发明授权
US07284316B1 Method for forming a hard bias structure in a magnetoresistive sensor
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在磁阻传感器中形成硬偏压结构的方法
- 专利标题: Method for forming a hard bias structure in a magnetoresistive sensor
- 专利标题(中): 在磁阻传感器中形成硬偏压结构的方法
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申请号: US10991712申请日: 2004-11-17
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公开(公告)号: US07284316B1公开(公告)日: 2007-10-23
- 发明人: Yiming Huai , Jinqiu Zhang , Jing Zhang
- 申请人: Yiming Huai , Jinqiu Zhang , Jing Zhang
- 申请人地址: US CA Lake Forest
- 专利权人: Western Digital (Fremont), LLC
- 当前专利权人: Western Digital (Fremont), LLC
- 当前专利权人地址: US CA Lake Forest
- 主分类号: G11B5/127
- IPC分类号: G11B5/127 ; H04R31/00
摘要:
A method for forming a hard bias structure in a magnetoresistive sensor is disclosed. A magnetoresistive sensor having a soft magnetic bias layer, spacer layer, and a magnetoresistive layer, is formed over a substrate having a gap layer. A mask is formed over a portion of the magnetoresistive sensor structure to define a central region. The masked structure is ion milled to remove portions not shielded by the mask, to form the central region with sloped sides, and to expose a region of the gap layer laterally adjacent the sloped sides. A first underlayer is deposited onto at least the sloped sides at a high deposition angle. A second underlayer is deposited to at least partially overlap the first underlayer, and at a first lower deposition angle. A hard bias layer is deposited over at least a portion of the second underlayer, and at a second lower deposition angle.
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