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发明授权
US07288746B2 Integrated thermal unit having laterally adjacent bake and chill plates on different planes 有权
集成热单元具有横向相邻的烘烤和冷却板在不同的平面上

Integrated thermal unit having laterally adjacent bake and chill plates on different planes
摘要：
An integrated thermal unit comprising a bake plate having a substrate holding surface configured to hold and heat a substrate in a baking position and a chill plate having a substrate holding surface configured to hold and cool a substrate in a cooling position where the substrate holding surface of the bake plate is positioned in a first substantially horizontal plane when the bake plate is in the baking position and the substrate holding surface of the chill plate is positioned in a second substantially horizontal plane that is below the first plane when the chill plate is in a cooling position.
摘要（中）：

一种集成热单元，包括具有被配置为在烘烤位置保持和加热基板的基板保持表面的烘烤板，以及具有基板保持表面的冷却板，所述冷却板被配置为在基板保持表面的基板保持表面的冷却位置保持和冷却基板 当烘烤板处于烘烤位置时，烘烤板定位在第一基本上水平的平面中，并且当冷却板处于烘烤位置时，冷却板的基板保持表面定位在第二基本水平的平面内，该第二基本水平的平面位于第一平面之下 冷却位置。

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