发明授权
- 专利标题: Copper conducting wire structure and fabricating method thereof
- 专利标题(中): 铜导线结构及其制造方法
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申请号: US11219718申请日: 2005-09-07
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公开(公告)号: US07289183B2公开(公告)日: 2007-10-30
- 发明人: Feng-Yuan Gan , Han-Tu Lin , Kuo-Yuan Tu
- 申请人: Feng-Yuan Gan , Han-Tu Lin , Kuo-Yuan Tu
- 申请人地址: TW Hsin-Chu
- 专利权人: AU Optronics Corp.
- 当前专利权人: AU Optronics Corp.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Bacon & Thomas PLLC
- 优先权: TW94117136A 20050525
- 主分类号: G02F1/1343
- IPC分类号: G02F1/1343 ; B32B3/00
摘要:
A copper conducting wire structure is for use in the thin-film-transistor liquid crystal display (LCD) device. The copper conducting wire structure includes at least a buffer layer and a copper layer. A fabricating method of the copper conducting wire structure includes the following steps. At first, a glass substrate is provided. Next, the buffer layer is formed on the glass substrate. The buffer layer is comprised of a copper nitride. At last, the copper layer is formed on the buffer layer.
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