发明授权
- 专利标题: Broadband ellipsometer / polarimeter system
- 专利标题(中): 宽带椭偏仪/旋光仪系统
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申请号: US11315334申请日: 2005-12-23
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公开(公告)号: US07298480B2公开(公告)日: 2007-11-20
- 发明人: Enric Garcia-Caurel , Antonello De Martino , Bernard Drevillon
- 申请人: Enric Garcia-Caurel , Antonello De Martino , Bernard Drevillon
- 申请人地址: FR Palaiseau
- 专利权人: Ecole Polytechnique
- 当前专利权人: Ecole Polytechnique
- 当前专利权人地址: FR Palaiseau
- 代理机构: Young & Thompson
- 主分类号: G01J4/00
- IPC分类号: G01J4/00
摘要:
A broadband ellipsometer/polarimeter system for analyzing a sample includes an illumination source emitting a polychromatic light beam, a polarization state generator (PSG) including a fixed linear polarizer and a substantially achromatic retarder mounted on a rotating holder, a sample holder, a polarization state analyser (PSA) including a fixed linear polarizer and a substantially achromatic retarder mounted on a rotating holder, a primary detection system measuring the intensities at each wavelength of the light beam transmitted through the PSA, optics to collimate the beam into the PSG and into the PSA and to focus the beam into the sample surface and the detector. The linear polarizer and achromatic retarder in the PSA are identical to those of the PSG but mounted in a reverse order.
公开/授权文献
- US20070146706A1 Broadband ellipsometer / polarimeter system 公开/授权日:2007-06-28
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