公开(公告)号：US08405830B2

公开(公告)日：2013-03-26

申请号：US13126618

申请日：2009-10-28

申请人： Denis Cattelan ,  Enric Garcia-Caurel ,  Antonello De Martino ,  Bernard Drevillon

发明人： Denis Cattelan ,  Enric Garcia-Caurel ,  Antonello De Martino ,  Bernard Drevillon

IPC分类号： G01J4/00

CPC分类号： G01N21/211 ,  G01N2021/213

摘要： A spectroscopic polarimetric system of broad spectral range, includes a light source suitable for emitting an incident light beam over a wavelength range, a polarization state generator (PSG), a polarization state analyzer (PSA), and a detector. The PSG and the PSA have respective elements for modulating the polarization of the light beam. The elements of the PSG for modulating polarization are suitable for generating a sequence of m polarization states with m>4 at each measurement wavelength, the elements of the PSA for modulating polarization are suitable for determining a sequence of n polarization states with n>4 for each measurement wavelength, and the detector elements are suitable for acquiring a sequence of N measurements with 16

摘要翻译： 具有宽光谱范围的光谱极化系统包括适于发射波长范围内的入射光束的光源，偏振状态发生器（PSG），偏振状态分析器（PSA）和检测器。 PSG和PSA具有用于调制光束的偏振的各自的元件。 用于调制偏振的PSG的元件适用于在每个测量波长处产生具有m≥4的m个偏振态的序列，用于调制偏振的PSA的元件适用于确定n≥4的n个极化状态的序列 每个测量波长和检测器元件适合于在每个波长处获得具有16

公开(公告)号：US07298480B2

公开(公告)日：2007-11-20

申请号：US11315334

申请日：2005-12-23

申请人： Enric Garcia-Caurel ,  Antonello De Martino ,  Bernard Drevillon

发明人： Enric Garcia-Caurel ,  Antonello De Martino ,  Bernard Drevillon

IPC分类号： G01J4/00

CPC分类号： G01J4/04 ,  G01N21/211

摘要： A broadband ellipsometer/polarimeter system for analyzing a sample includes an illumination source emitting a polychromatic light beam, a polarization state generator (PSG) including a fixed linear polarizer and a substantially achromatic retarder mounted on a rotating holder, a sample holder, a polarization state analyser (PSA) including a fixed linear polarizer and a substantially achromatic retarder mounted on a rotating holder, a primary detection system measuring the intensities at each wavelength of the light beam transmitted through the PSA, optics to collimate the beam into the PSG and into the PSA and to focus the beam into the sample surface and the detector. The linear polarizer and achromatic retarder in the PSA are identical to those of the PSG but mounted in a reverse order.

摘要翻译： 用于分析样本的宽带椭偏仪/偏振计系统包括发射多色光束的照明源，包括固定线性偏振器的偏振状态发生器（PSG）和安装在旋转保持器上的基本上消色差延迟器，样本保持器，偏振状态 分析器（PSA），其包括固定的线性偏振器和安装在旋转保持器上的基本上消色差的延迟器，初级检测系统测量透射穿过PSA的光束的每个波长处的强度，将光束准直到PSG中并进入 PSA并将光束聚焦到样品表面和检测器中。 PSA中的线性偏振器和消色差延迟器与PSG的线性偏振器和消色差延迟器相同，但是以相反的顺序安装。

公开(公告)号：US20050012041A1

公开(公告)日：2005-01-20

申请号：US10874322

申请日：2004-06-24

申请人： Enric Garcia-Caurel ,  Bernard Drevillon ,  Laurent Schwartz

发明人： Enric Garcia-Caurel ,  Bernard Drevillon ,  Laurent Schwartz

IPC分类号： G01N21/35 ,  G01N21/21 ,  G01N33/487 ,  G01J5/02 ,  G01J4/00

CPC分类号： G01N21/211

摘要： The invention is about an FTIR ellipsometry device and process for characterization of samples of complex biological materials, notably micro-organisms. According to the device part of the invention, the sample is a preparation by a deposition of the biological material on a substrate, the FTIR ellipsometry device has means to illuminate the sample on the substrate with variable wavelength infrared light and to produce at each predetermined value of the variable wavelength a measurement, the measurements defining a characterization spectrum, each measurement being one of the following values: Ψ, one of ellipsometric parameters in relation to a complex reflectivity ratio; Δ, one of ellipsometric parameters in relation to a complex reflectivity ratio; a trigonometric function of Ψ and Δ; or a derivative at any order of one of the previous values.

摘要翻译： 本发明涉及用于表征复杂生物材料，特别是微生物样品的FTIR椭偏仪装置和方法。 根据本发明的器件部分，样品是通过将生物材料沉积在基底上的制剂，FTIR椭偏仪装置具有用可变波长红外光照射衬底上的样品并以每个预定值产生的装置 可变波长的测量，测量定义了表征光谱，每个测量是以下值之一：Psi，相对于复反射率的椭偏参数之一; 三角形，复数反射率之间的椭偏参数之一; Psi和Delta的三角函数; 或以前一个值之一的任何顺序派生。

公开(公告)号：US20070146706A1

公开(公告)日：2007-06-28

申请号：US11315334

申请日：2005-12-23

申请人： Enric Garcia-Caurel ,  Antonello De Martino ,  Bernard Drevillon

发明人： Enric Garcia-Caurel ,  Antonello De Martino ,  Bernard Drevillon

IPC分类号： G01J4/00

CPC分类号： G01J4/04 ,  G01N21/211

摘要： The present invention concerns a broadband ellipsometer/polarimeter system for analysing a sample (8) comprising an illumination source (5) emitting a polychromatic light beam (12), a polarisation state generator (PSG) (6) including a fixed linear polarizer (13) and a substantially achromatic retarder (21) mounted on a rotating holder (14), a sample holder (3), a polarisation state analyser (PSA) (10) including a fixed linear polarizer (20) and a substantially achromatic retarder (22) mounted on a rotating holder (19), a primary detection system (11) measuring the intensities at each wavelength of the light beam transmitted through said PSA (10), optics to collimate the beam into the PSG (6) and into the PSA (10) and to focus the beam into the sample surface (8) and the detector (11). According to the invention, said linear polarizer (20) and said substantially achromatic retarder (22) in the PSA (10) are identical to the linear polarizer (13) and the substantially achromatic retarder (21) of the PSG (6) but mounted in a reverse order, said rotating holders (14, 19) run in a stepper mode allowing a set of four selected orientation angles for the retarders (21, 22), said four selected orientation angles being optimized in order to maintain the condition numbers of the modulation and analysis matrices associated respectively with the PSG (6) and the PSA (10), over 0.2.

摘要翻译： 本发明涉及用于分析包括发射多色光束（12）的照明源（5）和包括固定线性偏振器（13）的偏振状态发生器（PSG）（6））的样本（8）的宽带椭偏仪/偏振计系统 ）和安装在旋转保持器（14）上的基本上消色差的延迟器（21），样品保持器（3），包括固定线性偏振器（20）和基本上消色差延迟器（22）的偏振态分析器（PSA） ）安装在旋转保持器（19）上的主要检测系统（11），测量透过所述PSA（10）的光束的每个波长处的强度的光学器件，用于将束准直到PSG（6）中并进入PSA （10）并将光束聚焦到样品表面（8）和检测器（11）中。 根据本发明，PSA（10）中的所述线性偏振器（20）和所述基本消色差延迟器（22）与PSG（6）的线性偏振器（13）和基本消色差延迟器（21）相同，但安装 以相反的顺序，所述旋转保持器（14,19）以步进模式运行，允许针对延迟器（21,22）的一组四个选定的取向角，所述四个选定的取向角被优化，以便保持条件数 分别与PSG（6）和PSA（10）相关联的调制和分析矩阵超过0.2。