Invention Grant
- Patent Title: Device modeling for proximity effects
- Patent Title (中): 邻近效应的设备建模
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Application No.: US10248853Application Date: 2003-02-25
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Publication No.: US07302376B2Publication Date: 2007-11-27
- Inventor: Eric Adler , Serge Biesemans , Micah S. Galland , Terence B. Hook , Judith H. McCullen , Eric S. Phipps , James A. Slinkman
- Applicant: Eric Adler , Serge Biesemans , Micah S. Galland , Terence B. Hook , Judith H. McCullen , Eric S. Phipps , James A. Slinkman
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Anthony J. Canale
- Main IPC: G06F17/50
- IPC: G06F17/50
Abstract:
A method for calibrating a software model for a given structure of interest for a variable imposed by an adjacent structure. First determine the spatial extent of the variable imposed by the adjacent structure. Then assign a value to the spatial extent, which varies as a function of distance from the adjacent structure to the given structure. Finally, attach that value to the model of the given structure.
Public/Granted literature
- US20040034517A1 DEVICE MODELING FOR PROXIMITY EFFECTS Public/Granted day:2004-02-19
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