发明授权
- 专利标题： Laser micromachining method
- 专利标题（中）： 激光微加工方法
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申请号： US10985572申请日： 2004-11-10
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公开(公告)号： US07303977B2公开(公告)日： 2007-12-04
- 发明人: Sergei L. Voronov , Christopher L. Rumer
- 申请人： Sergei L. Voronov , Christopher L. Rumer
- 申请人地址： US CA Santa Clara
- 专利权人： Intel Corporation
- 当前专利权人： Intel Corporation
- 当前专利权人地址： US CA Santa Clara
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
A laser micromachining method is disclosed wherein a workpiece is milled using an incident beam from a laser beam focused above the surface of the workpiece. The incident beam is guided by a plasma channel generated by the incident beam. The plasma channel, which has a relatively constant diameter over an extended distance, is generated by continual Kerr effect self-focusing balanced by ionization of air beam defocusing.
公开/授权文献
- US20060099810A1 Laser micromachining method 公开/授权日：2006-05-11
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