Laser micromachining method
    1.
    发明授权
    Laser micromachining method 有权
    激光微加工方法

    公开(公告)号:US07303977B2

    公开(公告)日:2007-12-04

    申请号:US10985572

    申请日:2004-11-10

    IPC分类号: H01L21/00

    摘要: A laser micromachining method is disclosed wherein a workpiece is milled using an incident beam from a laser beam focused above the surface of the workpiece. The incident beam is guided by a plasma channel generated by the incident beam. The plasma channel, which has a relatively constant diameter over an extended distance, is generated by continual Kerr effect self-focusing balanced by ionization of air beam defocusing.

    摘要翻译: 公开了一种激光微加工方法,其中使用来自聚焦在工件表面上的激光束的入射光束研磨工件。 入射光束由入射光束产生的等离子体通道引导。 等离子体通道在延长的距离上具有相对恒定的直径,是由通过气流散焦电离平衡的连续克尔效应自聚焦产生的。

    Laser micromachining method
    3.
    发明授权
    Laser micromachining method 有权
    激光微加工方法

    公开(公告)号:US07169687B2

    公开(公告)日:2007-01-30

    申请号:US10980943

    申请日:2004-11-03

    IPC分类号: H01L21/00

    摘要: A method is described for laser scribing or dicing portions of a workpiece using multi-source laser systems. In one embodiment, a first laser uses multiphoton absorption to lower the ablation threshold of portions of the workpiece prior to a second laser ablating the portions of the workpiece. In an alternative embodiment, a first laser uses high energy single-photon absorption to lower the ablation threshold of portions of the workpiece prior to a second laser ablating the portions of the workpiece.

    摘要翻译: 描述了使用多源激光系统的工件的激光划线或切割部分的方法。 在一个实施例中,第一激光器在第二激光烧蚀工件的部分之前,使用多光子吸收来降低部分工件的消融阈值。 在替代实施例中,第一激光器在第二激光烧蚀工件的部分之前使用高能单光子吸收来降低部分工件的消融阈值。

    Method to compensate for stress between heat spreader and thermal interface material
    8.
    发明授权
    Method to compensate for stress between heat spreader and thermal interface material 有权
    弥补散热器和热界面材料之间应力的方法

    公开(公告)号:US06748350B2

    公开(公告)日:2004-06-08

    申请号:US09963438

    申请日:2001-09-27

    IPC分类号: G06G748

    摘要: A device and method identify and compensate for tensile and/or shear stress due to heat-caused expansion and contraction between an integrated heat spreader and thermal interface material. This device and method may change the shape of the integrated heat spreader based upon the identification of location(s) of high tensile and/or shear stress so that additional thermal interface material may be deposited between the integrated heat spreader and a die in corresponding locations. Utilizing this method and device, heat is efficiently transferred from the die to the integrated heat spreader.

    摘要翻译: 一种装置和方法识别和补偿由于集成散热器和热界面材料之间的热引起的膨胀和收缩引起的拉伸和/或剪切应力。 该装置和方法可以基于识别高拉伸和/或剪切应力的位置来改变集成散热器的形状,使得额外的热界面材料可以沉积在集成的散热器和相应位置的模具之间 。 利用该方法和装置,将热量从模具有效地传递到集成散热器。