发明授权
- 专利标题: Examination apparatus and focusing method of examination apparatus
- 专利标题(中): 检查仪器和检查仪器的聚焦方法
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申请号: US11090036申请日: 2005-03-28
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公开(公告)号: US07304790B2公开(公告)日: 2007-12-04
- 发明人: Yoshihiro Kawano , Isao Ishibe , Yoshihisa Tanikawa , Atsuhiro Tsuchiya
- 申请人: Yoshihiro Kawano , Isao Ishibe , Yoshihisa Tanikawa , Atsuhiro Tsuchiya
- 申请人地址: JP Tokyo
- 专利权人: Olympus Corporation
- 当前专利权人: Olympus Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Kenyon & Kenyon LLP
- 优先权: JP2004-100439 20040330
- 主分类号: G02B21/00
- IPC分类号: G02B21/00
摘要:
A focusing method for an examination apparatus that can quickly and easily perform focusing for fluoroscopy is provided. The focusing method, for an examination apparatus that can observe fluorescence emitted from a specimen, includes a first step of irradiating the specimen with light via an objective lens to generate reflected light and fluorescence; a second step of performing focusing with respect to the surface of the specimen using the reflected light from the specimen; and a third step of performing focusing for the fluorescence based on the focal position of the specimen surface in the second step.
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