发明授权
- 专利标题: Semiconductor device
- 专利标题(中): 半导体器件
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申请号: US10989388申请日: 2004-11-17
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公开(公告)号: US07307298B2公开(公告)日: 2007-12-11
- 发明人: Masao Yamane , Atsushi Kurokawa , Shinya Osakabe , Eigo Tange , Yasushi Shigeno , Hiroyuki Takazawa
- 申请人: Masao Yamane , Atsushi Kurokawa , Shinya Osakabe , Eigo Tange , Yasushi Shigeno , Hiroyuki Takazawa
- 申请人地址: JP Tokyo
- 专利权人: Renesas Technology Corp.
- 当前专利权人: Renesas Technology Corp.
- 当前专利权人地址: JP Tokyo
- 代理机构: Mattingly, Stanger, Malur & Brundidge, P.C.
- 优先权: JP2003-397982 20031127
- 主分类号: H01L29/80
- IPC分类号: H01L29/80 ; H01L31/12
摘要:
The present invention miniaturizes a HEMT element used as a switching element in a radio frequency module. A single gate electrode 17 is formed in an active region defined by an element separation portion 9 on a main surface of a substrate 1 comprising GaAs. The gate electrode 17 is patterned so as to extend in the vertical direction of the page surface between source electrodes 13 and drain electrodes 14, and to extend in left and right directions at other portions. Thus, the ratio of the gate electrode 17 disposed outside the active region is reduced, and the area of a gate pad 17A is reduced.
公开/授权文献
- US20050116253A1 Semiconductor device 公开/授权日:2005-06-02
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