发明授权
- 专利标题: High-temperature pressure sensor
- 专利标题(中): 高温压力传感器
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申请号: US11509397申请日: 2006-08-25
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公开(公告)号: US07313965B2公开(公告)日: 2008-01-01
- 发明人: Vinayak Tilak , Jie Jiang , David Mulford Shaddock , Stacey Joy Kennerly , David Richard Esler , Aaron Jay Knobloch
- 申请人: Vinayak Tilak , Jie Jiang , David Mulford Shaddock , Stacey Joy Kennerly , David Richard Esler , Aaron Jay Knobloch
- 申请人地址: US NY Niskayuna
- 专利权人: General Electric Company
- 当前专利权人: General Electric Company
- 当前专利权人地址: US NY Niskayuna
- 代理商 Shawn A. McClintic; William E. Powell, II
- 主分类号: G01L9/00
- IPC分类号: G01L9/00
摘要:
A high-temperature pressure sensor that includes a dielectric layer. The pressure sensor also includes a substrate capable of withstanding temperatures greater than 450° C. without entering a phase change, at least one semiconducting material deposited on the sapphire substrate, and a silicon dioxide layer deposited over the semiconducting material. One aspect of the pressure sensor includes a second semiconducting material.
公开/授权文献
- US20060283255A1 High-temperature pressure sensor 公开/授权日:2006-12-21
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