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发明授权
US07315319B2 Laser induced thermal imaging apparatus, laser induced thermal imaging method using the apparatus, and method of fabricating organic light emitting display using the apparatus 失效
激光感应热成像装置，使用该装置的激光感应热成像方法以及使用该装置制造有机发光显示器的方法

Laser induced thermal imaging apparatus, laser induced thermal imaging method using the apparatus, and method of fabricating organic light emitting display using the apparatus
摘要：
A laser induced thermal imaging apparatus, and a laser induced thermal imaging method and a method of fabricating an organic light emitting display using the apparatus are provided. The laser induced thermal imaging apparatus includes a chuck for fixing an acceptor substrate. A lamination unit for laminating a donor film on the acceptor substrate is located on the chuck. The lamination unit includes a body having a cavity, a gas injection port for injecting a compression gas into the cavity and a gas discharge port for discharging the gas injected into the cavity onto the substrate. A laser irradiator for irradiating a laser beam on the laminated donor film through the lamination unit is located on the lamination unit.
摘要（中）：

提供激光感应热成像装置，激光感应热成像方法和使用该装置制造有机发光显示器的方法。 激光诱导热成像装置包括用于固定受主衬底的卡盘。 用于在受主基板上层叠供体膜的层叠单元位于卡盘上。 层叠单元包括具有空腔的本体，用于将压缩气体注入到空腔中的气体注入口和用于将注入到空腔中的气体排放到基板上的气体排出口。 用于通过层叠单元将激光束照射在层叠的供体膜上的激光照射器位于层压单元上。

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