Invention Grant
- Patent Title: Aspects of producing, directing, conditioning, impinging and detecting spectroscopic electromagnetic radiation from small spots on samples
- Patent Title (中): 从样品上的小点产生，引导，调理，撞击和检测光谱电磁辐射的方面
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Application No.: US10928429Application Date: 2004-08-27
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Publication No.: US07317529B1Publication Date: 2008-01-08
- Inventor: Martin M. Liphardt , Ping He , Blaine D. Johs , Galen L. Pfeiffer , James D. Welch , John A. Woollam
- Applicant: Martin M. Liphardt , Ping He , Blaine D. Johs , Galen L. Pfeiffer , James D. Welch , John A. Woollam
- Applicant Address: US NE Lincoln
- Assignee: J.A. Woollam Co., Inc.
- Current Assignee: J.A. Woollam Co., Inc.
- Current Assignee Address: US NE Lincoln
- Agent James D. Welch
- Main IPC: G01N21/88
- IPC: G01N21/88
Abstract:
Systems and methods for providing and enhancing electromagnetic radiation beam radial energy homogeneity and intensity vs. wavelength content, for reliably directing electromagnetic radiation emitted by a source thereof in a common direction, for achromatically reducing spot size on a sample (eg. liquid cavity containing lenses and low aberration 1:1 imaging systems modified to perform as spatial filters), and for directing different wavelengths into different detectors, in ellipsometer, polarizer or the like systems.
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