发明授权
- 专利标题: High speed linear and rotary split-axis wire bonder
- 专利标题(中): 高速直线和旋转分轴焊丝机
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申请号: US10715809申请日: 2003-11-17
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公开(公告)号: US07320423B2公开(公告)日: 2008-01-22
- 发明人: Krishnan Suresh , David T. Beatson
- 申请人: Krishnan Suresh , David T. Beatson
- 申请人地址: US PA Fort Washington
- 专利权人: Kulicke and Soffa Industries, Inc.
- 当前专利权人: Kulicke and Soffa Industries, Inc.
- 当前专利权人地址: US PA Fort Washington
- 代理商 Christopher M. Spletzer, Sr.
- 主分类号: B23K37/00
- IPC分类号: B23K37/00 ; B23K31/00 ; B23K31/02
摘要:
A wire bonding machine is disclosed for bonding a wire to a semiconductor device. The wire bonding machine includes a wire bonding head having a bonding tool mounted to it. The bonding tool is adapted to attach a wire end to a semiconductor device. At least a portion of the bonding head is pivotable about a first horizontal axis so as to provide vertical displacement of the bonding tool. The bonding head is also rotatably mounted to the bonding machine so as to permit rotation of the bonding tool about a vertically oriented rotational axis. The machine also includes a work table for supporting at least one semiconductor device to be wire bonded. A conveyance system is used to translate the work table in a direction relative to the bonding head and in a substantially orthogonal direction to the horizontal pivot axis of the bonding head.
公开/授权文献
- US20040129754A1 High speed linear and rotary split-axis wire bonder 公开/授权日:2004-07-08
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