Invention Grant
US07323812B2 Process for producing diamond electron emission element and electron emission element
失效
制造金刚石电子发射元件和电子发射元件的方法
- Patent Title: Process for producing diamond electron emission element and electron emission element
- Patent Title (中): 制造金刚石电子发射元件和电子发射元件的方法
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Application No.: US10555296Application Date: 2004-09-29
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Publication No.: US07323812B2Publication Date: 2008-01-29
- Inventor: Natsuo Tatsumi , Akihiko Namba , Yoshiki Nishibayashi , Takahiro Imai
- Applicant: Natsuo Tatsumi , Akihiko Namba , Yoshiki Nishibayashi , Takahiro Imai
- Applicant Address: JP Osaka
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JP Osaka
- Agency: Darby & Darby P.C.
- Priority: JP2003-340594 20030930
- International Application: PCT/JP2004/014671 WO 20040929
- International Announcement: WO2005/031781 WO 20050407
- Main IPC: H01J9/30
- IPC: H01J9/30

Abstract:
A method for production includes a step for forming concave molds on a surface of a substrate and a step for growing a diamond heteroepitaxially on the substrate in an atmosphere containing a doping material. The crystal structure of the slope of the concave molds of the substrate can have the cubic system crystal orientation (111), and the doping material is phosphorous. Further, the substrate is Si, and the slope of the molds can be the Si(111) face. The diamond electron emission device contains projection parts on the surface thereof, where a slope of the projection parts 1 contains a diamond (111) face, and flat parts 2, which are not the projection parts, contain face orientations other than (100) face or (110) face and grain boundaries.
Public/Granted literature
- US20060220514A1 Process for producing diamond electron emission element and electron emission element Public/Granted day:2006-10-05
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