发明授权
US07323812B2 Process for producing diamond electron emission element and electron emission element
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制造金刚石电子发射元件和电子发射元件的方法
- 专利标题: Process for producing diamond electron emission element and electron emission element
- 专利标题(中): 制造金刚石电子发射元件和电子发射元件的方法
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申请号: US10555296申请日: 2004-09-29
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公开(公告)号: US07323812B2公开(公告)日: 2008-01-29
- 发明人: Natsuo Tatsumi , Akihiko Namba , Yoshiki Nishibayashi , Takahiro Imai
- 申请人: Natsuo Tatsumi , Akihiko Namba , Yoshiki Nishibayashi , Takahiro Imai
- 申请人地址: JP Osaka
- 专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人地址: JP Osaka
- 代理机构: Darby & Darby P.C.
- 优先权: JP2003-340594 20030930
- 国际申请: PCT/JP2004/014671 WO 20040929
- 国际公布: WO2005/031781 WO 20050407
- 主分类号: H01J9/30
- IPC分类号: H01J9/30
摘要:
A method for production includes a step for forming concave molds on a surface of a substrate and a step for growing a diamond heteroepitaxially on the substrate in an atmosphere containing a doping material. The crystal structure of the slope of the concave molds of the substrate can have the cubic system crystal orientation (111), and the doping material is phosphorous. Further, the substrate is Si, and the slope of the molds can be the Si(111) face. The diamond electron emission device contains projection parts on the surface thereof, where a slope of the projection parts 1 contains a diamond (111) face, and flat parts 2, which are not the projection parts, contain face orientations other than (100) face or (110) face and grain boundaries.
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