Invention Grant
- Patent Title: Apparatus and method for detecting photon emissions from transistors
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Application No.: US11380044Application Date: 2006-04-25
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Publication No.: US07323862B2Publication Date: 2008-01-29
- Inventor: Romain Desplats , Patricia Le Coupanec , William K. Lo , Philippe Perdu , Steven Kasapi
- Applicant: Romain Desplats , Patricia Le Coupanec , William K. Lo , Philippe Perdu , Steven Kasapi
- Applicant Address: US CA Milpitas
- Assignee: Credence Systems Corporation
- Current Assignee: Credence Systems Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Sughrue Mion PLLC
- Agent Joseph Bach
- Main IPC: G01R31/28
- IPC: G01R31/28

Abstract:
A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor. After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.
Public/Granted literature
- US20060181268A1 APPARATUS AND METHOD FOR DETECTING PHOTON EMISSIONS FROM TRANSISTORS Public/Granted day:2006-08-17
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