发明授权
- 专利标题： Parylene-based flexible multi-electrode arrays for neuronal stimulation and recording and methods for manufacturing the same
- 专利标题（中）： 用于神经元刺激和记录的聚对二苯乙烯柔性多电极阵列及其制造方法
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申请号： US11130814申请日： 2005-05-16
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公开(公告)号： US07326649B2公开(公告)日： 2008-02-05
- 发明人: Damien C. Rodger , Mark Humayun , Yu-Chong Tai , James D. Weiland
- 申请人： Damien C. Rodger , Mark Humayun , Yu-Chong Tai , James D. Weiland
- 申请人地址： US CA Los Angeles US CA Pasadena
- 专利权人： University of Southern California,California Institute of Technology
- 当前专利权人： University of Southern California,California Institute of Technology
- 当前专利权人地址： US CA Los Angeles US CA Pasadena
- 代理机构： Townsend and Townsend and Crew LLP
- 代理商 Gerald T. Gray
- 主分类号： H01L21/44
- IPC分类号： H01L21/44
摘要：
Method for manufacturing a parylene-based electrode array that includes an underlying parylene layer, one or more patterned electrode layers comprising a conductive material such as a metal, and one or more overlying parylene layers. The overlying parylene is etched away or otherwise processed to expose the electrodes where stimulation or recording is to occur. All other conductive material in the device is occluded from the environment by the two layers of parylene surrounding it.
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