公开(公告)号：US07326649B2

公开(公告)日：2008-02-05

申请号：US11130814

申请日：2005-05-16

申请人： Damien C. Rodger ,  Mark Humayun ,  Yu-Chong Tai ,  James D. Weiland

发明人： Damien C. Rodger ,  Mark Humayun ,  Yu-Chong Tai ,  James D. Weiland

IPC分类号： H01L21/44

CPC分类号： H05K1/032 ,  A61N1/04 ,  A61N1/0543 ,  A61N1/0551 ,  H05K1/0393 ,  H05K3/0041 ,  H05K3/007 ,  H05K3/048 ,  H05K3/467 ,  H05K3/4682 ,  H05K2201/0179 ,  H05K2203/016

摘要： Method for manufacturing a parylene-based electrode array that includes an underlying parylene layer, one or more patterned electrode layers comprising a conductive material such as a metal, and one or more overlying parylene layers. The overlying parylene is etched away or otherwise processed to expose the electrodes where stimulation or recording is to occur. All other conductive material in the device is occluded from the environment by the two layers of parylene surrounding it.

摘要翻译： 制造聚对二甲苯基电极阵列的方法，其包括下面的聚对二甲苯层，一个或多个图案化的电极层，包括导电材料如金属和一个或多个上覆的聚对二甲苯层。 将上覆的聚对二甲苯蚀刻掉或以其他方式处理，以暴露要进行刺激或记录的电极。 器件中的所有其他导电材料都被周围的两层聚对二甲苯从环境中吸收。

公开(公告)号：US07774931B2

公开(公告)日：2010-08-17

申请号：US11414139

申请日：2006-04-28

申请人： Yu-Chong Tai ,  Damien C. Rodger ,  Wen Li ,  Mark Humayun ,  James D. Weiland ,  Hossein Ameri ,  Armand R. Tanguay, Jr.

发明人： Yu-Chong Tai ,  Damien C. Rodger ,  Wen Li ,  Mark Humayun ,  James D. Weiland ,  Hossein Ameri ,  Armand R. Tanguay, Jr.

IPC分类号： H05K3/30

CPC分类号： A61N1/0543 ,  A61F9/08 ,  A61N1/36046 ,  Y10T29/49002 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49156 ,  Y10T29/49224

摘要： Intraocular retinal prosthesis devices and methods for fabricating the same. A prosthesis device includes a cable region that connects an electrode array region with a power and data management region. The electrode array region includes one or more arrays of exposed electrodes, and the power and data management region includes various power and control elements. The power and data management elements, in one aspect, include an RF coil or coils and circuit arrangements and/or chips configured to provide drive signals to the electrodes via a cable and receive power and signals from the RF coil or coils. Each region includes elements fabricated on or in a single polymer layer during the same fabrication process.

摘要翻译： 眼内视网膜假体装置及其制造方法。 假体装置包括将电极阵列区域与功率和数据管理区域连接的电缆区域。 电极阵列区域包括一个或多个暴露电极阵列，功率和数据管理区域包括各种功率和控制元件。 功率和数据管理元件在一个方面包括RF线圈或线圈以及经配置以通过电缆向电极提供驱动信号并且从RF线圈或线圈接收功率和信号的电路布置和/或芯片。 每个区域包括在相同的制造过程中在单个聚合物层上或在单个聚合物层中制造的元件。

公开(公告)号：US07684868B2

公开(公告)日：2010-03-23

申请号：US11272382

申请日：2005-11-10

申请人： Yu-Chong Tai ,  Damien C. Rodger ,  Wen Li ,  Mark Humayun ,  James D. Weiland

发明人： Yu-Chong Tai ,  Damien C. Rodger ,  Wen Li ,  Mark Humayun ,  James D. Weiland

IPC分类号： A61N1/40

CPC分类号： H01F7/06 ,  H01F5/06 ,  H01F17/0006 ,  H01F38/14 ,  H01F2007/068 ,  H01L21/6835 ,  H01L2221/68345 ,  H04B5/00 ,  H04B5/0031 ,  H04B5/0037 ,  H04B5/0093

摘要： This invention relates to the design and fabrication of micro electromechanical systems (MEMS) for applications in such varied fields as the biomedical, micro-fluidics and chemical analysis fields.

摘要翻译： 本发明涉及在诸如生物医学，微流体学和化学分析领域的各种领域中的应用的微机电系统（MEMS）的设计和制造。

公开(公告)号：US07252006B2

公开(公告)日：2007-08-07

申请号：US11148124

申请日：2005-06-07

申请人： Yu-Chong Tai ,  Ellis Meng ,  Po-Jui Chen ,  Damien C. Rodger ,  Mark Humayun

发明人： Yu-Chong Tai ,  Ellis Meng ,  Po-Jui Chen ,  Damien C. Rodger ,  Mark Humayun

IPC分类号： G01L9/00

CPC分类号： A61B3/16 ,  A61B2562/02 ,  A61B2562/028 ,  G01L7/045

摘要： A biocompatible, mechanical, micromachined pressure sensor and methods of manufacturing such a pressure sensor are provided. The pressure sensor of the current invention includes a high-aspect-ratio curved-tube structure fabricated through a one-layer parylene process. The pressure sensor of the current invention requires zero power consumption and indicates the pressure variation by changes of the in situ in-plane motion of the sensor, which can be gauged externally by a direct and convenient optical observation. In one embodiment, the pressure sensor of the current invention has been shown to work as an IOP sensor for eye implantation where the intraocular in-plane motion of the sensor can be recorded from outside of the eye, such that the intraocular pressure in glaucoma patients can be constantly monitored.

摘要翻译： 提供生物相容的，机械的，微加工的压力传感器以及制造这种压力传感器的方法。 本发明的压力传感器包括通过一层聚对二甲苯工艺制造的高纵横比弯曲管结构。 本发明的压力传感器需要零功率消耗，并且通过传感器的原位面内运动的变化来指示压力变化，其可以通过直接和方便的光学观察在外部测量。 在一个实施例中，本发明的压力传感器已经被证明可用作眼睛植入的IOP传感器，其中可以从眼睛外部记录传感器的眼内平面内运动，使得青光眼患者的眼内压 可以不断监控。

公开(公告)号：US07706887B2

公开(公告)日：2010-04-27

申请号：US11933222

申请日：2007-10-31

申请人： Yu-Chong Tai ,  Damien C. Rodger

发明人： Yu-Chong Tai ,  Damien C. Rodger

IPC分类号： A61N1/18

CPC分类号： H01L24/19 ,  B81C1/0023 ,  B81C1/00333 ,  H01L21/561 ,  H01L21/568 ,  H01L21/6835 ,  H01L23/5387 ,  H01L23/5389 ,  H01L24/97 ,  H01L2221/68345 ,  H01L2224/04105 ,  H01L2224/20 ,  H01L2224/211 ,  H01L2224/24137 ,  H01L2224/96 ,  H01L2224/97 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01023 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01057 ,  H01L2924/01061 ,  H01L2924/01074 ,  H01L2924/01077 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/12041 ,  H01L2924/12042 ,  H01L2924/12044 ,  H01L2924/14 ,  H01L2924/1433 ,  H01L2924/1461 ,  H01L2924/1815 ,  H01L2924/19043 ,  H01L2224/82 ,  H01L2924/00

摘要： A method (and resulting structure) for fabricating a sensing device. The method includes providing a substrate comprising a surface region and forming an insulating material overlying the surface region. The method also includes forming a film of carbon based material overlying the insulating material and treating to the film of carbon based material to pyrolyzed the carbon based material to cause formation of a film of substantially carbon based material having a resistivity ranging within a predetermined range. The method also provides at least a portion of the pyrolyzed carbon based material in a sensor application and uses the portion of the pyrolyzed carbon based material in the sensing application. In a specific embodiment, the sensing application is selected from chemical, humidity, piezoelectric, radiation, mechanical strain or temperature.

摘要翻译： 一种用于制造感测装置的方法（和结果）。 该方法包括提供包括表面区域并形成覆盖表面区域的绝缘材料的基板。 该方法还包括形成覆盖绝缘材料的碳基材料薄膜，并处理碳基材料薄膜以热解碳基材料，以形成电阻率范围在预定范围内的基本上碳基材料的薄膜。 该方法还在传感器应用中提供热解碳基材料的至少一部分，并且在感测应用中使用部分热解碳基材料。 在具体实施例中，感测应用选自化学，湿度，压电，辐射，机械应变或温度。

公开(公告)号：US20100025613A1

公开(公告)日：2010-02-04

申请号：US12565636

申请日：2009-09-23

申请人： Yu-Chong Tai ,  Po-Jui Chen ,  Damien C. Rodger ,  Mark S. Humayun

发明人： Yu-Chong Tai ,  Po-Jui Chen ,  Damien C. Rodger ,  Mark S. Humayun

IPC分类号： F16K17/02 ,  B21D53/10

CPC分类号： F16K99/0005 ,  F16K99/0015 ,  F16K99/0057 ,  Y10T29/49409 ,  Y10T137/0497 ,  Y10T137/7866 ,  Y10T137/7895 ,  Y10T137/7904 ,  Y10T137/7914

摘要： Micro check valves having a free-floating member for controlling flow of fluid in microfluidic and biomedical applications and methods of fabrication. A micro check valve includes a valve seat, a valve cap that contacts the valve seat and an untethered floating member that can move between the valve seat and the valve cap. Certain micro check valves have zero cracking pressure and no reverse leakage. Certain other valves may be configured to permit flow of fluid within a pressure range. The floating member can be solid or define an orifice, and the valve seat can have one or two levels. Valves can be configured to allow fluid to flow when the floating member is pushed by fluid against the valve cap or against the valve seat. The valve seat may be silicon or another material that is compatible with micromachining processes, and the valve cap and the floating member may be a polymer such as Parylene.

摘要翻译： 微型止回阀具有用于控制微流体和生物医学应用中的流体流动的自由浮动部件和制造方法。 微型止回阀包括阀座，接触阀座的阀盖和可在阀座与阀盖之间移动的无阻力浮动件。 某些微型止回阀具有零开裂压力，无反向泄漏。 某些其它阀可以被配置为允许流体在压力范围内流动。 浮动构件可以是固定的或限定孔口，并且阀座可以具有一个或两个水平面。 阀可以被配置为当浮动构件被流体压靠在阀盖或阀座上时流体流动。 阀座可以是硅或与微加工过程相容的另一种材料，阀帽和浮动元件可以是聚合物，例如聚对二甲苯。

公开(公告)号：US07338836B2

公开(公告)日：2008-03-04

申请号：US10974006

申请日：2004-10-25

申请人： Yu-Chong Tai ,  Damien C. Rodger

发明人： Yu-Chong Tai ,  Damien C. Rodger

IPC分类号： H01L21/44

CPC分类号： H01L24/19 ,  B81C1/0023 ,  B81C1/00333 ,  H01L21/561 ,  H01L21/568 ,  H01L21/6835 ,  H01L23/5387 ,  H01L23/5389 ,  H01L24/97 ,  H01L2221/68345 ,  H01L2224/04105 ,  H01L2224/20 ,  H01L2224/211 ,  H01L2224/24137 ,  H01L2224/96 ,  H01L2224/97 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01023 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01057 ,  H01L2924/01061 ,  H01L2924/01074 ,  H01L2924/01077 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/12041 ,  H01L2924/12042 ,  H01L2924/12044 ,  H01L2924/14 ,  H01L2924/1433 ,  H01L2924/1461 ,  H01L2924/1815 ,  H01L2924/19043 ,  H01L2224/82 ,  H01L2924/00

摘要： A method for manufacturing integrated objects, e.g., electronic devices, biological devices. The method includes providing a holder substrate, which has at least one recessed region, the recessed region having a predetermined shape. The holder substrate has a selected thickness and is characterized as being substantially rigid in shape. The method includes aligning a chip comprising a face and a backside into the predetermined shape of the recessed region and disposing the chip into the recessed region. The chip is secured into the recessed region. The method includes providing a first film of insulating material having a first thickness overlying the face and portions of the holder substrate to attach the chip to a portion of the first film of insulating material and patterning the first film of insulating material to form at least one opening through a portion of the first thickness to a contact region on the face of the chip. The method includes forming a metallization layer overlying the first film of insulating material to couple to the contact region through the one opening and forming a protective layer overlying the metallization layer. The method includes releasing the chip from the holder substrate while maintaining attachment of the chip to the first film of insulating material.

摘要翻译： 一种用于制造诸如电子装置的生物装置的集成物体的方法。 该方法包括提供具有至少一个凹陷区域的保持器基底，该凹陷区域具有预定形状。 保持器基板具有选定的厚度，并且其特征在于其形状基本上是刚性的。 该方法包括将包括面和背面的芯片对准到凹陷区域的预定形状，并将芯片设置在凹陷区域中。 芯片固定在凹陷区域内。 该方法包括提供绝缘材料的第一膜，其具有覆盖在保持器基板的表面和部分上的第一厚度，以将芯片附接到第一绝缘材料膜的一部分，并且使第一绝缘材料膜形成图案以形成至少一个 通过第一厚度的一部分打开到芯片的表面上的接触区域。 该方法包括形成覆盖绝缘材料的第一膜的金属化层，以通过一个开口耦合到接触区域并形成覆盖金属化层的保护层。 该方法包括从保持器基板释放芯片，同时保持芯片与第一绝缘材料膜的连接。

公开(公告)号：US08336387B2

公开(公告)日：2012-12-25

申请号：US12848837

申请日：2010-08-02

申请人： Yu-Chong Tai ,  Po-Jui Chen ,  Damien C. Rodger ,  Mark S. Humayun

发明人： Yu-Chong Tai ,  Po-Jui Chen ,  Damien C. Rodger ,  Mark S. Humayun

IPC分类号： G01L9/00 ,  G01L9/16

CPC分类号： A61B3/16 ,  A61B5/0031 ,  A61B5/0215 ,  A61B5/03 ,  G01L9/0072

摘要： A variable capacitor, a microfabricated implantable pressure sensor including a variable capacitor and an inductor, and related pressure measurement and implantation methods. The inductor may have a fixed or variable inductance. A variable capacitor and pressure sensors include a flexible member that is disposed on a substrate and defines a chamber. Capacitor elements extend indirectly from the flexible member. Sufficient fluidic pressure applied to an exterior surface of the flexible member causes the flexible member to move or deform, thus causing the capacitance and/or inductance to change. Resulting changes in resonant frequency or impedance can be detected to determine pressure, e.g., intraocular pressure.

摘要翻译： 可变电容器，包括可变电容器和电感器的微加工可植入压力传感器，以及相关的压力测量和植入方法。 电感器可以具有固定或可变电感。 可变电容器和压力传感器包括设置在基板上并限定腔室的柔性构件。 电容元件从柔性元件间接延伸。 施加到柔性构件的外表面上的足够的流体压力导致柔性构件移动或变形，从而导致电容和/或电感改变。 可以检测谐振频率或阻抗的所得变化以确定压力，例如眼内压。

公开(公告)号：US07900518B2

公开(公告)日：2011-03-08

申请号：US11847262

申请日：2007-08-29

申请人： Yu-Chong Tai ,  Po-Jui Chen ,  Damien C. Rodger ,  Mark S. Humayun

发明人： Yu-Chong Tai ,  Po-Jui Chen ,  Damien C. Rodger ,  Mark S. Humayun

IPC分类号： G01L9/00

CPC分类号： A61B3/16 ,  A61B5/0031 ,  A61B5/0215 ,  A61B5/03 ,  G01L9/0072

摘要： A variable capacitor, a microfabricated implantable pressure sensor including a variable capacitor and an inductor, and related pressure measurement and implantation methods. The inductor may have a fixed or variable inductance. A variable capacitor and pressure sensors include a flexible member that is disposed on a substrate and defines a chamber. Capacitor elements extend indirectly from the flexible member. Sufficient fluidic pressure applied to an exterior surface of the flexible member causes the flexible member to move or deform, thus causing the capacitance and/or inductance to change. Resulting changes in resonant frequency or impedance can be detected to determine pressure, e.g., intraocular pressure.

摘要翻译： 可变电容器，包括可变电容器和电感器的微加工可植入压力传感器，以及相关的压力测量和植入方法。 电感器可以具有固定或可变电感。 可变电容器和压力传感器包括设置在基板上并限定腔室的柔性构件。 电容元件从柔性元件间接延伸。 施加到柔性构件的外表面上的足够的流体压力导致柔性构件移动或变形，从而导致电容和/或电感改变。 可以检测谐振频率或阻抗的所得变化以确定压力，例如眼内压。

公开(公告)号：US07600533B2

公开(公告)日：2009-10-13

申请号：US11837450

申请日：2007-08-10

申请人： Yu-Chong Tai ,  Po-Jui Chen ,  Damien C. Rodger ,  Mark S. Humayun

发明人： Yu-Chong Tai ,  Po-Jui Chen ,  Damien C. Rodger ,  Mark S. Humayun

IPC分类号： F16K15/14

CPC分类号： F16K99/0005 ,  F16K99/0015 ,  F16K99/0057 ,  Y10T29/49409 ,  Y10T137/0497 ,  Y10T137/7866 ,  Y10T137/7895 ,  Y10T137/7904 ,  Y10T137/7914

摘要： Micro check valves having a free-floating member for controlling flow of fluid in microfluidic and biomedical applications and methods of fabrication. A micro check valve includes a valve seat, a valve cap that contacts the valve seat and an untethered floating member that can move between the valve seat and the valve cap. Certain micro check valves have zero cracking pressure and no reverse leakage. Certain other valves may be configured to permit flow of fluid within a pressure range. The floating member can be solid or define an orifice, and the valve seat can have one or two levels. Valves can be configured to allow fluid to flow when the floating member is pushed by fluid against the valve cap or against the valve seat. The valve seat may be silicon or another material that is compatible with micromachining processes, and the valve cap and the floating member may be a polymer such as Parylene.

摘要翻译： 微型止回阀具有用于控制微流体和生物医学应用中的流体流动的自由浮动部件和制造方法。 微型止回阀包括阀座，接触阀座的阀盖和可在阀座与阀盖之间移动的无阻力浮动件。 某些微型止回阀具有零开裂压力，无反向泄漏。 某些其它阀可以被配置为允许流体在压力范围内流动。 浮动构件可以是固定的或限定孔口，并且阀座可以具有一个或两个水平面。 阀可以被配置为当浮动构件被流体压靠在阀盖或阀座上时流体流动。 阀座可以是硅或与微加工过程相容的另一种材料，阀帽和浮动元件可以是聚合物，例如聚对二甲苯。