发明授权
- 专利标题: Method of forming a metal oxide dielectric
- 专利标题(中): 形成金属氧化物电介质的方法
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申请号: US11362453申请日: 2006-02-24
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公开(公告)号: US07326656B2公开(公告)日: 2008-02-05
- 发明人: Justin K. Brask , Brian S. Doyle , Jack Kavalleros , Mark Doczy , Uday Shah , Robert S. Chau
- 申请人: Justin K. Brask , Brian S. Doyle , Jack Kavalleros , Mark Doczy , Uday Shah , Robert S. Chau
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Blakely, Sokoloff, Taylor & Zafman LLP
- 主分类号: H01L21/31
- IPC分类号: H01L21/31
摘要:
A semiconductor device comprising a semiconductor body having a top surface and a first and second laterally opposite sidewalls as formed on an insulating substrate is claimed. A gate dielectric is formed on the top surface of the semiconductor body and on the first and second laterally opposite sidewalls of the semiconductor body. A gate electrode is then formed on the gate dielectric on the top surface of the semiconductor body and adjacent to the gate dielectric on the first and second laterally opposite sidewalls of the semiconductor body. The gate electrode comprises a metal film formed directly adjacent to the gate dielectric layer. A pair of source and drain regions are then formed in the semiconductor body on opposite sides of the gate electrode.
公开/授权文献
- US20060138553A1 Nonplanar transistors with metal gate electrodes 公开/授权日:2006-06-29
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