发明授权
- 专利标题: Beam plasma source
- 专利标题(中): 光束等离子体源
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申请号: US10528386申请日: 2003-09-19
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公开(公告)号: US07327089B2公开(公告)日: 2008-02-05
- 发明人: John E. Madocks
- 申请人: John E. Madocks
- 申请人地址: US AZ Tucson
- 专利权人: Applied Process Technologies, Inc.
- 当前专利权人: Applied Process Technologies, Inc.
- 当前专利权人地址: US AZ Tucson
- 代理商 Lawrence R. Oremland, P.C.
- 国际申请: PCT/US03/29204 WO 20030919
- 国际公布: WO2004/027825 WO 20040401
- 主分类号: H01J7/24
- IPC分类号: H01J7/24
摘要:
A plasma source which includes a discharge cavity having a first width, where that discharge cavity includes a top portion, a wall portion, and a nozzle disposed on the top portion and extending outwardly therefrom, where the nozzle is formed to include an aperture extending through the top portion and into the discharge cavity, wherein the aperture has a second width, where the second width is less than the first width. The plasma source further includes a power supply, a conduit disposed in the discharge cavity for introducing an ionizable gas therein, and at least one cathode electrode connected to the power supply, where that cathode electrode is capable of supporting at least one magnetron discharge region within the discharge cavity. The plasma source further includes a plurality of magnets disposed adjacent the wall portion, where that plurality of magnets create a null magnetic field point within the discharge cavity.
公开/授权文献
- US20060152162A1 Beam plasma source 公开/授权日:2006-07-13