发明授权
- 专利标题: Spectroscope and spectrum laser microscope
- 专利标题(中): 光谱仪和光谱激光显微镜
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申请号: US11207872申请日: 2005-08-22
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公开(公告)号: US07330257B2公开(公告)日: 2008-02-12
- 发明人: Yoshinori Kuroiwa , Hisashi Okugawa
- 申请人: Yoshinori Kuroiwa , Hisashi Okugawa
- 申请人地址: JP Tokyo
- 专利权人: Nikon Corporation
- 当前专利权人: Nikon Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Miles & Stockbridge P.C.
- 优先权: JP2004-242729 20040823
- 主分类号: G01J3/28
- IPC分类号: G01J3/28
摘要:
An object is to provide a spectroscope and a spectrum laser microscope capable of carrying out sensitivity correction of a multi-channel photodetector with real time. The spectrum laser microscope 100 includes a laser microscope 101 and a spectral analyzer 103 having a multi-channel photodetector 13 composed of a plurality of photodetectors 13i for detecting spectral distribution of the light from the laser microscope 101. Sensitivity fluctuation of the plurality of photodetectors 13i is calculated from a first luminance data detected before shifting relative position between the spectra and the multi-channel photodetector 13 and a second luminance data detected after shifting. Then, the first luminance data or the second luminance data is corrected.
公开/授权文献
- US20060038996A1 Spectroscope and spectrum laser microscope 公开/授权日:2006-02-23
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