发明授权
US07335397B2 Pressure gradient CVI/CVD apparatus and method 有权
压力梯度CVI / CVD装置及方法

Pressure gradient CVI/CVD apparatus and method
摘要:
An apparatus and method for densifying porous structures inside a furnace using pressure gradient CVI/CVD. The apparatus includes a stack of porous structures where each porous structure has an aperture therethrough. The apparatus also includes at least one ring-like spacer disposed within the stack of porous structures between neighboring porous structures. The ring-like spacer encircles the apertures of the neighboring porous structures. The stack of porous structures and the at least one ring-like spacer define an enclosed cavity including each porous structure aperture. A channel provides fluid communication between the enclosed cavity and an outer volume defined by the interior surface of the furnace.
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