发明授权
- 专利标题: Pressure gradient CVI/CVD apparatus and method
- 专利标题(中): 压力梯度CVI / CVD装置及方法
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申请号: US10780265申请日: 2004-02-16
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公开(公告)号: US07335397B2公开(公告)日: 2008-02-26
- 发明人: James W. Rudolph , Paul T. Perea , John S. Linck , Chris T. Kirkpatrick , Richard Jones
- 申请人: James W. Rudolph , Paul T. Perea , John S. Linck , Chris T. Kirkpatrick , Richard Jones
- 申请人地址: US NC Charlotte
- 专利权人: Goodrich Corporation
- 当前专利权人: Goodrich Corporation
- 当前专利权人地址: US NC Charlotte
- 代理机构: Brinks Hofer Gilson & Lione
- 主分类号: C23C16/00
- IPC分类号: C23C16/00
摘要:
An apparatus and method for densifying porous structures inside a furnace using pressure gradient CVI/CVD. The apparatus includes a stack of porous structures where each porous structure has an aperture therethrough. The apparatus also includes at least one ring-like spacer disposed within the stack of porous structures between neighboring porous structures. The ring-like spacer encircles the apertures of the neighboring porous structures. The stack of porous structures and the at least one ring-like spacer define an enclosed cavity including each porous structure aperture. A channel provides fluid communication between the enclosed cavity and an outer volume defined by the interior surface of the furnace.
公开/授权文献
- US20050178327A1 Pressure gradient CVI/CVD apparatus and method 公开/授权日:2005-08-18
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