发明授权
- 专利标题: Positive resist composition
- 专利标题(中): 正抗蚀剂组成
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申请号: US10317110申请日: 2002-12-12
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公开(公告)号: US07335454B2公开(公告)日: 2008-02-26
- 发明人: Shinichi Kanna , Kazuyoshi Mizutani , Kunihiko Kodama , Tomoya Sasaki
- 申请人: Shinichi Kanna , Kazuyoshi Mizutani , Kunihiko Kodama , Tomoya Sasaki
- 申请人地址: JP Tokyo
- 专利权人: FUJIFILM Corporation
- 当前专利权人: FUJIFILM Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Sughrue Mion, PLLC.
- 优先权: JPP.2001-380104 20011213; JPP.2001-380105 20011213
- 主分类号: G03C1/00
- IPC分类号: G03C1/00
摘要:
A positive resist composition comprising (A) a fluorine group-containing resin, which has a structure substituted with a fluorine atom in the main chain and/or side chain of polymer skeleton and a group that is decomposed by the action of an acid to increase solubility in an alkali developer and (B) an acid generator capable of generating an acid upon irradiation of an actinic ray or radiation, and the acid generator of (B) is a compound selected from a sulfonium salt containing no aromatic ring and a compound having a phenacylsulfonium salt structure.
公开/授权文献
- US20030194650A1 Positive resist composition 公开/授权日:2003-10-16
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