发明授权
- 专利标题: Methods of fabricating flash memory devices and flash memory devices fabricated thereby
- 专利标题(中): 制造闪存器件和闪存器件的方法
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申请号: US11261820申请日: 2005-10-28
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公开(公告)号: US07338849B2公开(公告)日: 2008-03-04
- 发明人: Dong-Chan Kim , Chang-Jin Kang , Kyeong-Koo Chi , Dong-Hyun Kim
- 申请人: Dong-Chan Kim , Chang-Jin Kang , Kyeong-Koo Chi , Dong-Hyun Kim
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Myers Bigel Sibley & Sajovec, PA
- 优先权: KR10-2004-0087518 20041029
- 主分类号: H01L21/8238
- IPC分类号: H01L21/8238 ; H01L29/788
摘要:
Methods of fabricating a flash memory device and flash memory devices fabricated thereby are provided. One of the methods includes forming an isolation layer in a semiconductor substrate to define a plurality of parallel active regions in the semiconductor substrate. A plurality of first conductive layer patterns are formed on the active regions. The first conductive layer patterns are spaced apart from each other in a lengthwise direction of the active regions. An insulating layer is conformally formed on the semiconductor substrate and the first conductive layer patterns. A second conductive layer is formed on the insulating layer. The second conductive layer is patterned until the insulating layer is exposed to form a plurality of parallel second conductive layer patterns. The second conductive layer patterns cross the active regions and the isolation layer to overlap the first conductive layer patterns.
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