Invention Grant
- Patent Title: Split gate flash memory device having self-aligned control gate and method of manufacturing the same
- Patent Title (中): 具有自对准控制门的分体式闪存器件及其制造方法
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Application No.: US11301854Application Date: 2005-12-13
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Publication No.: US07341912B2Publication Date: 2008-03-11
- Inventor: Byung-yong Choi , Chang-woo Oh , Dong-gun Park , Dong-won Kim , Yong-kyu Lee
- Applicant: Byung-yong Choi , Chang-woo Oh , Dong-gun Park , Dong-won Kim , Yong-kyu Lee
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Mills & Onello LLP
- Priority: KR10-2005-0015041 20050223
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
In a flash memory device, which can maintain an enhanced electric field between a control gate and a storage node (floating gate) and has a reduced cell size, and a method of manufacturing the flash memory device, the flash memory device includes a semiconductor substrate having a pair of drain regions and a source region formed between the pair of drain regions, a pair of spacer-shaped control gates each formed on the semiconductor substrate between the source region and each of the drain regions, and a storage node formed in a region between the control gate and the semiconductor substrate. A bottom surface of each of the control gates includes a first region that overlaps with the semiconductor substrate and a second region that overlaps with the storage node. The pair of spacer-shaped control gates are substantially symmetrical with each other about the source region.
Public/Granted literature
- US20060186460A1 Split gate flash memory device having self-aligned control gate and method of manufacturing the same Public/Granted day:2006-08-24
Information query
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