发明授权
US07352461B2 Particle detecting method and storage medium storing program for implementing the method
失效
用于实现该方法的粒子检测方法和存储介质存储程序
- 专利标题： Particle detecting method and storage medium storing program for implementing the method
- 专利标题（中）： 用于实现该方法的粒子检测方法和存储介质存储程序
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申请号： US11289688申请日： 2005-11-30
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公开(公告)号： US07352461B2公开(公告)日： 2008-04-01
- 发明人: Susumu Saito , Hisashi Isozaki , Takashi Kakinuma , Noritaka Nishioka , Akira Noda
- 申请人： Susumu Saito , Hisashi Isozaki , Takashi Kakinuma , Noritaka Nishioka , Akira Noda
- 申请人地址： JP Tokyo JP Tokyo
- 专利权人： Tokyo Electron Limited,Kabushiki Kaisha TOPCON
- 当前专利权人： Tokyo Electron Limited,Kabushiki Kaisha TOPCON
- 当前专利权人地址： JP Tokyo JP Tokyo
- 代理机构： Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- 优先权： JP2004-347000 20041130
- 主分类号： G01N15/02
- IPC分类号： G01N15/02 ; G01N21/00
摘要：
A particle detecting method which is capable of detecting the number of low-speed particles accurately, and a storage medium storing a program for implementing the method. Intensity of scattered light generated when a light emitted into a gas stream is scattered by a particle is measured using a light receiving sensor at predetermined time intervals. A measuring time period for measuring the scattered light intensity is divided into measurement periods each defined as a predetermined time period, and a measured time point in each measurement period is selected at which a maximum value of the scattered light intensity measured is measured. The number of particles having passed by in front of the light receiving sensor is counted based on the measured time point selected in each measurement period.
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