公开(公告)号：US07352461B2

公开(公告)日：2008-04-01

申请号：US11289688

申请日：2005-11-30

申请人： Susumu Saito ,  Hisashi Isozaki ,  Takashi Kakinuma ,  Noritaka Nishioka ,  Akira Noda

发明人： Susumu Saito ,  Hisashi Isozaki ,  Takashi Kakinuma ,  Noritaka Nishioka ,  Akira Noda

IPC分类号： G01N15/02 ,  G01N21/00

CPC分类号： G01N15/1459 ,  G01N21/94 ,  G01N2015/1486

摘要： A particle detecting method which is capable of detecting the number of low-speed particles accurately, and a storage medium storing a program for implementing the method. Intensity of scattered light generated when a light emitted into a gas stream is scattered by a particle is measured using a light receiving sensor at predetermined time intervals. A measuring time period for measuring the scattered light intensity is divided into measurement periods each defined as a predetermined time period, and a measured time point in each measurement period is selected at which a maximum value of the scattered light intensity measured is measured. The number of particles having passed by in front of the light receiving sensor is counted based on the measured time point selected in each measurement period.

摘要翻译： 能够精确地检测低速粒子的数量的粒子检测方法，以及存储实现该方法的程序的存储介质。 使用光接收传感器以预定的时间间隔测量当发射到气流中的光被颗粒散射时产生的散射光的强度。 用于测量散射光强度的测量时间段被划分为每个定义为预定时间段的测量时段，并且选择测量每个测量周期中测量的散射光强度的最大值的测量时间点。 基于在每个测量周期中选择的测量时间点来对光接收传感器前面通过的颗粒数进行计数。

公开(公告)号：US20060132771A1

公开(公告)日：2006-06-22

申请号：US11289688

申请日：2005-11-30

申请人： Susumu Saito ,  Hisashi Isozaki ,  Takashi Kakinuma ,  Noritaka Nishioka ,  Akira Noda

发明人： Susumu Saito ,  Hisashi Isozaki ,  Takashi Kakinuma ,  Noritaka Nishioka ,  Akira Noda

IPC分类号： G01N15/02 ,  G01N21/00

CPC分类号： G01N15/1459 ,  G01N21/94 ,  G01N2015/1486

摘要： A particle detecting method which is capable of detecting the number of low-speed particles accurately, and a storage medium storing a program for implementing the method. Intensity of scattered light generated when a light emitted into a gas stream is scattered by a particle is measured using a light receiving sensor at predetermined time intervals. A measuring time period for measuring the scattered light intensity is divided into measurement periods each defined as a predetermined time period, and a measured time point in each measurement period is selected at which a maximum value of the scattered light intensity measured is measured. The number of particles having passed by in front of the light receiving sensor is counted based on the measured time point selected in each measurement period.

摘要翻译： 能够精确地检测低速粒子的数量的粒子检测方法，以及存储实现该方法的程序的存储介质。 使用光接收传感器以预定的时间间隔测量当发射到气流中的光被颗粒散射时产生的散射光的强度。 用于测量散射光强度的测量时间段被划分为每个定义为预定时间段的测量时段，并且选择测量每个测量周期中测量的散射光强度的最大值的测量时间点。 基于在每个测量周期中选择的测量时间点来对光接收传感器前面通过的颗粒数进行计数。

公开(公告)号：US08009286B2

公开(公告)日：2011-08-30

申请号：US12442879

申请日：2007-12-04

申请人： Hisashi Isozaki ,  Takehiro Takase ,  Takashi Kakinuma ,  Hiroyuki Maekawa ,  Fumio Koda ,  Michihiro Yamazaki

发明人： Hisashi Isozaki ,  Takehiro Takase ,  Takashi Kakinuma ,  Hiroyuki Maekawa ,  Fumio Koda ,  Michihiro Yamazaki

IPC分类号： G01N21/00

CPC分类号： G01N21/9501 ,  G01N21/47 ,  G01N21/55 ,  G01N21/8422 ,  G01N21/94 ,  G01N21/9505 ,  G01N2201/06113

摘要： A light source section outputs optical flux having two types of wavelength, which are a short wavelength and a long wavelength, while the intensity is made variable. The output from the first light intensity detecting section in irradiating the optical flux having a short wavelength is compared with the output from the first light intensity detecting section in irradiating the optical flux having a long wavelength. A disappearance level near a point where the detected signal from the internal subject disappears is calculated. The first intensity of optical flux having a long wavelength is set to level higher than the disappearance level. Based on the output from the first light intensity detecting section obtained by the optical flux having a long wavelength of the first intensity, a subject inside the body to be detected is measured.

摘要翻译： 光源部分输出具有短波长和长波长的两种波长的光通量，同时强度可变。 在照射长波长的光通量时，将照射具有短波长的光束的来自第一光强度检测部的输出与来自第一光强检测部的输出进行比较。 计算来自内部对象的检测信号消失的点附近的消失水平。 具有长波长的光通量的第一强度被设置为高于消失水平的水平。 基于通过具有第一强度的长波长的光通量获得的来自第一光强检测部的输出，测量被检体内的被检体。

公开(公告)号：US20100007872A1

公开(公告)日：2010-01-14

申请号：US12442879

申请日：2007-12-04

申请人： Hisashi Isozaki ,  Takehiro Takase ,  Takashi Kakinuma ,  Hiroyuki Maekawa ,  Fumio Koda ,  Michihiro Yamazaki

发明人： Hisashi Isozaki ,  Takehiro Takase ,  Takashi Kakinuma ,  Hiroyuki Maekawa ,  Fumio Koda ,  Michihiro Yamazaki

IPC分类号： G01N21/956 ,  H01L21/66 ,  G01J3/00 ,  G01N21/00

CPC分类号： G01N21/9501 ,  G01N21/47 ,  G01N21/55 ,  G01N21/8422 ,  G01N21/94 ,  G01N21/9505 ,  G01N2201/06113

摘要： A light source section outputs optical flux having two types of wavelength, which are a short wavelength and a long wavelength, while the intensity is made variable. The optical flux is made incident to a detected surface of a body to be detected at a predetermined incident angle simultaneously or alternatively. Based on a type of optical flux outputted from the light source section and an output from a first light intensity detecting section, at least the intensity of the optical flux having a long wavelength outputted from the light source section is adjusted. The output from the first light intensity detecting section in irradiating the optical flux having a short wavelength is compared with the output from the first light intensity detecting section in irradiating the optical flux having a long wavelength. A signal that appears only in the output from the first light intensity detecting section in irradiating the optical flux having a long wavelength is identified as a detected signal from an internal subject. The intensity of optical flux having a long wavelength is adjusted. A disappearance level near a point where the detected signal from the internal subject disappears is calculated. The first intensity of optical flux having a long wavelength is set to level higher than the disappearance level. Based on the output from the first light intensity detecting section obtained by the optical flux having a long wavelength of the first intensity, a subject inside the body to be detected is measured.

摘要翻译： 光源部分输出具有短波长和长波长的两种波长的光通量，同时强度可变。 光通量以预定的入射角同时或交替地入射到要检测的身体的检测表面。 基于从光源部输出的光通量和第一光强检测部的输出，至少从光源部输出的具有长波长的光通量的强度被调整。 在照射长波长的光通量时，将照射具有短波长的光束的来自第一光强度检测部的输出与来自第一光强检测部的输出进行比较。 作为来自内部被检体的检测信号，识别仅在来自第一光强检测部的输出中出现的长波长的光束的信号。 调整长波长的光通量的强度。 计算来自内部对象的检测信号消失的点附近的消失水平。 具有长波长的光通量的第一强度被设置为高于消失水平的水平。 基于通过具有第一强度的长波长的光通量获得的来自第一光强检测部的输出，测量被检体内的被检体。

公开(公告)号：US08692194B2

公开(公告)日：2014-04-08

申请号：US13165046

申请日：2011-06-21

申请人： Hisashi Isozaki ,  Hirotaka Tanaka

发明人： Hisashi Isozaki ,  Hirotaka Tanaka

IPC分类号： H01J37/28 ,  H01J37/22

CPC分类号： H01J37/228 ,  H01J37/226 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2443 ,  H01J2237/2482

摘要： The present invention provides an electron microscope device, comprising a scanning electron microscope 2 and an optical microscope 3, wherein the scanning electron microscope has scanning means 10 for scanning an electron beam and an electron detector 12 for detecting electron 11 issued from a specimen 8 scanned over by the electron beam, and the scanning electron microscope acquires a scanning electron image based on a detection result from the electron detector, the optical microscope has a light emitting source 13 for illuminating an illumination light, and the optical microscope illuminates the illumination light to the specimen, and acquires an optical image by receiving a reflection light from the specimen, and wherein the electron detector has a fluorescent substance layer for electron-light conversion, a wavelength filter for restricting so that all or almost all of wavelength ranges of the fluorescent light from the fluorescent substance layer passes through, and a wavelength detecting element for receiving the fluorescent light passing through the wavelength filter and performing optical-electric conversion, wherein the light amount of the illumination light in the wavelength range passing through the wavelength filter does not exceed a limit of deterioration of the scanning electron image.

摘要翻译： 本发明提供了一种电子显微镜装置，包括扫描电子显微镜2和光学显微镜3，其中扫描电子显微镜具有用于扫描电子束的扫描装置10和用于检测从扫描的样本8发出的电子11的电子检测器12 并且扫描电子显微镜基于来自电子检测器的检测结果获取扫描电子图像，光学显微镜具有用于照射照明光的发光源13，并且光学显微镜将照明光照射到 并且通过接收来自试样的反射光获取光学图像，并且其中电子检测器具有用于电子 - 光转换的荧光物质层，用于限制使得荧光的全部或几乎全部波长范围的波长滤波器 来自荧光物质层的光通过，并且是波长 用于接收通过波长滤波器的荧光并进行光电转换的检测元件，其中通过波长滤波器的波长范围内的照明光的光量不超过扫描电子图像的劣化极限。

公开(公告)号：US08243264B2

公开(公告)日：2012-08-14

申请号：US12857874

申请日：2010-08-17

申请人： Hisashi Isozaki ,  Yoshiyuki Enomoto

发明人： Hisashi Isozaki ,  Yoshiyuki Enomoto

IPC分类号： G01N21/00

CPC分类号： G01B11/245 ,  G01B11/25

摘要： A measuring apparatus measuring a surface shape of a target includes a projection optical system to radiate a line beam on the target, an imaging device to acquire a reflected line beam reflected from the target, an optical imaging system to cause the reflected line beam to form an image on a receiving surface of the imaging device to acquire a shape of the line beam on the target, and a splitting mechanism to split the reflected line beam so as to acquire the shape of the line beam on the target at different positions in an extending direction of the line beam and guide the split reflected line beams to the imaging device. A plurality of segments are set on the receiving surface while each segment in which at least one region is set as a reception region is partitioned into a plurality of regions, and the optical imaging system causes the split reflected line beams to form images on the reception regions in the different segments, respectively.

摘要翻译： 测量目标的表面形状的测量装置包括：投射光学系统，用于辐射目标上的线束;成像装置，用于获取从目标物体反射的反射线束;光学成像系统，用于使反射线束形成 获取成像装置的接收面上的图像，以获取目标上的线束的形状，以及分割机构，以分割反射线束，以便获得目标在不同位置上的线束的形状 延伸线束的方向，并将分离的反射线束引导到成像装置。 将多个片段设置在接收表面上，其中将至少一个区域设置为接收区域的每个片段被划分为多个区域，并且光学成像系统使分割的反射线束在接收时形成图像 分别在不同部分的区域。

公开(公告)号：US08097849B2

公开(公告)日：2012-01-17

申请号：US12653324

申请日：2009-12-11

申请人： Fumio Ohtomo ,  Hisashi Isozaki

发明人： Fumio Ohtomo ,  Hisashi Isozaki

IPC分类号： H01J37/28

CPC分类号： H01J37/28 ,  G02B21/06 ,  G02B21/365 ,  H01J37/22 ,  H01J37/265 ,  H01J2237/2482

摘要： The present invention provides an electron microscope device 1, comprising a scanning electron microscope 2 and an optical microscope 3, wherein the scanning electron microscope has scanning means 10 for scanning an electron beam and an electron detector 12 for detecting electrons issued from a specimen 8 scanned by the electron beam, and the scanning electron microscope acquires a scanning electron image based on a detection result from the electron detector, wherein the optical microscope projects an illumination light to the specimen, receives a reflection light from the specimen and acquires an optical image, and wherein an optical axis 7 of the scanning electron microscope crosses an optical axis 6 of the optical microscope at a point of observation of the specimen, wherein the scanning means projects the electron beam for scanning with a scanning width wider than a width of a scanning area, the optical microscope projects an illumination light and acquires an optical image in an overrunning portion where the electron beam is projected beyond the scanning area, and the scanning electron microscope acquires a scanning electron image based on electrons issued when the electron beam scans over the scanning area.

摘要翻译： 本发明提供一种电子显微镜装置1，其包括扫描电子显微镜2和光学显微镜3，其中扫描电子显微镜具有用于扫描电子束的扫描装置10和用于检测扫描的试样8发出的电子的电子检测器12 并且扫描电子显微镜基于来自电子检测器的检测结果获取扫描电子图像，其中光学显微镜向样本投射照明光，接收来自样本的反射光并获取光学图像， 并且其中扫描电子显微镜的光轴7在试样的观察点处与光学显微镜的光轴6交叉，其中扫描装置以比扫描宽度宽的扫描宽度投影扫描电子束 光学显微镜投射照明光并获取光学图像 电子束突出超过扫描区域的超越部分，扫描电子显微镜根据电子束扫描扫描区域时发出的电子获取扫描电子图像。

公开(公告)号：US20100163728A1

公开(公告)日：2010-07-01

申请号：US12653324

申请日：2009-12-11

申请人： Fumio Ohtomo ,  Hisashi Isozaki

发明人： Fumio Ohtomo ,  Hisashi Isozaki

IPC分类号： G01N23/225 ,  G02B21/06

CPC分类号： H01J37/28 ,  G02B21/06 ,  G02B21/365 ,  H01J37/22 ,  H01J37/265 ,  H01J2237/2482

摘要： The present invention provides an electron microscope device 1, comprising a scanning electron microscope 2 and an optical microscope 3, wherein the scanning electron microscope has scanning means 10 for scanning an electron beam and an electron detector 12 for detecting electrons issued from a specimen 8 scanned by the electron beam, and the scanning electron microscope acquires a scanning electron image based on a detection result from the electron detector, wherein the optical microscope projects an illumination light to the specimen, receives a reflection light from the specimen and acquires an optical image, and wherein an optical axis 7 of the scanning electron microscope crosses an optical axis 6 of the optical microscope at a point of observation of the specimen, wherein the scanning means projects the electron beam for scanning with a scanning width wider than a width of a scanning area, the optical microscope projects an illumination light and acquires an optical image in an overrunning portion where the electron beam is projected beyond the scanning area, and the scanning electron microscope acquires a scanning electron image based on electrons issued when the electron beam scans over the scanning area.

摘要翻译： 本发明提供一种电子显微镜装置1，其包括扫描电子显微镜2和光学显微镜3，其中扫描电子显微镜具有用于扫描电子束的扫描装置10和用于检测扫描的试样8发出的电子的电子检测器12 并且扫描电子显微镜基于来自电子检测器的检测结果获取扫描电子图像，其中光学显微镜向样本投射照明光，接收来自样本的反射光并获取光学图像， 并且其中扫描电子显微镜的光轴7在试样的观察点处与光学显微镜的光轴6交叉，其中扫描装置以比扫描宽度宽的扫描宽度投影扫描电子束 光学显微镜投射照明光并获取光学图像 电子束突出超过扫描区域的超越部分，扫描电子显微镜根据电子束扫描扫描区域时发出的电子获取扫描电子图像。

公开(公告)号：US08791415B2

公开(公告)日：2014-07-29

申请号：US12653366

申请日：2009-12-11

申请人： Hisashi Isozaki

发明人： Hisashi Isozaki

IPC分类号： G01N23/225

CPC分类号： H01J37/244 ,  H01J37/226 ,  H01J37/28 ,  H01J2237/02 ,  H01J2237/2445

摘要： The present invention provides an electron microscope device, comprising a scanning electron microscope 2 provided with scanning means 10 for scanning an electron beam and an electron detector 12 for detecting an electron 11 issued from a specimen 8 where the electron beam is projected for scanning, wherein a scanning electron image is acquired based on a detection result from the electron detector, wherein the electron detector comprises a fluorescent substance layer for performing photoelectric conversion, a wavelength filter giving restriction so that all or almost all of wavelength ranges of fluorescent lights from the fluorescent substance layer can be transmitted, and a wavelength detecting element for receiving the fluorescent light transmitted through the wavelength filter and for performing photoelectric conversion.

摘要翻译： 本发明提供一种电子显微镜装置，包括：扫描电子显微镜2，其具有用于扫描电子束的扫描装置10;以及电子检测器12，用于检测从用于扫描的电子束投射的样本8发出的电子11，其中 基于来自电子检测器的检测结果获取扫描电子图像，其中电子检测器包括用于进行光电转换的荧光物质层，波长滤波器提供限制，使得荧光灯的全部或几乎所有的荧光波长范围 可以传输物质层，以及用于接收透过波长滤波器并用于进行光电转换的荧光的波长检测元件。

公开(公告)号：US06611328B2

公开(公告)日：2003-08-26

申请号：US09785541

申请日：2001-02-20

申请人： Hisashi Isozaki ,  Yutaka Shida

发明人： Hisashi Isozaki ,  Yutaka Shida

IPC分类号： G01N2100

CPC分类号： G01N21/9501

摘要： The surface inspection apparatus comprises a light source section for emitting a first luminous flux and a second luminous flux; a first irradiation optical system in which the first luminous flux is irradiated on the surface of an inspected object at a first irradiation angle; a second irradiation optical system in which the second luminous flux is irradiated on the surface of an inspected object at a second irradiation angle different from the first irradiation angle; a displacement section for relatively displacing an inspected object and an irradiation luminous flux of the irradiation optical system; a light receiving optical system for receiving scattered light of the first luminous flux irradiated by the first irradiation optical system and produced from an inspection object on the surface of an inspected object and scattered light of the second luminous flux irradiated by the second irradiation optical system and produced from an inspection object on the surface of an inspected object; a first light receiving section for converting scattered light of the first luminous flux received by the light receiving optical system into a first light receiving signal; a second light receiving section for converting scattered light received by the light receiving optical system into a second light receiving signal; an inspection object distribution data forming section for forming inspection object distribution data on the basis of the first light receiving signal and the second light receiving signal; and a scratch processing section for scratch-processing inspection object distribution data.