Invention Grant
US07353771B2 Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator
有权
提供功率以在反应性气体发生器中点燃和维持等离子体的方法和装置
- Patent Title: Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator
- Patent Title (中): 提供功率以在反应性气体发生器中点燃和维持等离子体的方法和装置
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Application No.: US11268692Application Date: 2005-11-07
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Publication No.: US07353771B2Publication Date: 2008-04-08
- Inventor: Alan Millner , Thomas Alexander , Ilya Bystryak , Ken Tran , Madhuwanti Joshi
- Applicant: Alan Millner , Thomas Alexander , Ilya Bystryak , Ken Tran , Madhuwanti Joshi
- Applicant Address: US MA Wilmington
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Wilmington
- Agency: Proskauer Rose LLP
- Main IPC: C23C16/00
- IPC: C23C16/00

Abstract:
According to a first aspect, a power supply and a method of providing power for igniting a plasma in a reactive gas generator is provided that includes (i) coupling a series resonant circuit that comprises a resonant inductor and a resonant capacitor between a switching power source and a transformer, the transformer having a transformer primary and a plasma secondary; (ii) providing a substantially resonant AC voltage from the resonant capacitor across the transformer primary, thereby inducing a substantially resonant current within the transformer primary to generate the plasma secondary; and (iii) upon generation of the plasma secondary, the resonant inductor limiting current flowing to the switching power supply. According to another aspect, bipolar high voltage ignition electrodes can be used in conjunction with inductive energy coupling to aid in plasma ignition.
Public/Granted literature
- US20070103092A1 Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator Public/Granted day:2007-05-10
Information query
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