发明授权
- 专利标题： Method of producing a micro-actuator
- 专利标题（中）： 微型致动器的制造方法
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申请号： US11006340申请日： 2004-12-07
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公开(公告)号： US07356894B2公开(公告)日： 2008-04-15
- 发明人: Masanao Fujii , Toru Okada , Masayuki Kitajima , Hidehiko Kobayashi , Seiichi Shimoura
- 申请人： Masanao Fujii , Toru Okada , Masayuki Kitajima , Hidehiko Kobayashi , Seiichi Shimoura
- 申请人地址： JP Kawasaki
- 专利权人： Fujitsu Limited
- 当前专利权人： Fujitsu Limited
- 当前专利权人地址： JP Kawasaki
- 代理机构： Greer, Burns & Crain, Ltd.
- 优先权： JP2000-335868 20001102
- 主分类号： H01L41/22
- IPC分类号： H01L41/22 ; H01L41/00
摘要：
In a method of producing a micro-actuator, a first adhesive is applied to a movable plate, and a movable, and a movable electrode is placed on the first adhesive. A second adhesive is applied to the movable electrode, and a piezoelectric element is placed on the second adhesive. Next, a third adhesive is applied to an actuator base, a base electrode is placed on the third adhesive, and the third adhesive is semi-cured in the same manner as above. A fourth adhesive is applied to the base electrode, the piezoelectric element is placed on the fourth adhesive, and the fourth adhesive is semi-cured in the same manner as above. Finally, the adhered laminate thus obtained is placed into a heating furnace and heated at a predetermined temperature for a predetermined period of time to thereby fully cure the adhesives.
公开/授权文献
- US20050104477A1 Micro-actuator and method of producing the same 公开/授权日：2005-05-19
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