Invention Grant
- Patent Title: Method of producing a micro-actuator
- Patent Title (中): 微型致动器的制造方法
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Application No.: US11006340Application Date: 2004-12-07
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Publication No.: US07356894B2Publication Date: 2008-04-15
- Inventor: Masanao Fujii , Toru Okada , Masayuki Kitajima , Hidehiko Kobayashi , Seiichi Shimoura
- Applicant: Masanao Fujii , Toru Okada , Masayuki Kitajima , Hidehiko Kobayashi , Seiichi Shimoura
- Applicant Address: JP Kawasaki
- Assignee: Fujitsu Limited
- Current Assignee: Fujitsu Limited
- Current Assignee Address: JP Kawasaki
- Agency: Greer, Burns & Crain, Ltd.
- Priority: JP2000-335868 20001102
- Main IPC: H01L41/22
- IPC: H01L41/22 ; H01L41/00

Abstract:
In a method of producing a micro-actuator, a first adhesive is applied to a movable plate, and a movable, and a movable electrode is placed on the first adhesive. A second adhesive is applied to the movable electrode, and a piezoelectric element is placed on the second adhesive. Next, a third adhesive is applied to an actuator base, a base electrode is placed on the third adhesive, and the third adhesive is semi-cured in the same manner as above. A fourth adhesive is applied to the base electrode, the piezoelectric element is placed on the fourth adhesive, and the fourth adhesive is semi-cured in the same manner as above. Finally, the adhered laminate thus obtained is placed into a heating furnace and heated at a predetermined temperature for a predetermined period of time to thereby fully cure the adhesives.
Public/Granted literature
- US20050104477A1 Micro-actuator and method of producing the same Public/Granted day:2005-05-19
Information query
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