Invention Grant
US07356922B2 Method of fabricating a rate gyroscope and accelerometer multisensor
失效
制造速率陀螺仪和加速度计多传感器的方法
- Patent Title: Method of fabricating a rate gyroscope and accelerometer multisensor
- Patent Title (中): 制造速率陀螺仪和加速度计多传感器的方法
-
Application No.: US11113965Application Date: 2005-04-25
-
Publication No.: US07356922B2Publication Date: 2008-04-15
- Inventor: Charles R. Dauwalter , Donato Cardarelli , Paul Greiff
- Applicant: Charles R. Dauwalter , Donato Cardarelli , Paul Greiff
- Applicant Address: US MA West Newton
- Assignee: Milli Sensors Systems & Actuators, Inc.
- Current Assignee: Milli Sensors Systems & Actuators, Inc.
- Current Assignee Address: US MA West Newton
- Agency: Mirick, O'Connell, DeMallie & Lougee, LLP
- Agent Brian M. Dingman
- Main IPC: H05K3/02
- IPC: H05K3/02 ; H05K3/10

Abstract:
Three magnetic substrates are provided, the first substrate forms the rotor and the other two form the outer stator. A series of spaced concentric grooves and spaced spiral grooves are formed in the central region of both faces of the first substrate. A hole is placed at the center of the spiral grooves, and filled with magnetic material. A conductor is then deposited into the spiral grooves, forming a central wheel. A series of spaced serpentine grooves and generally radial grooves are formed on each active face of the other two substrates. A conductor is then deposited into the serpentine grooves, and a magnetic material is deposited into the generally radial grooves. The two outer substrates are then bonded against the first substrate such that the outer end of each magnetic path overlays a filled hole in the first substrate, creating the stator of an axial air gap reluctance motor.
Public/Granted literature
- US20050239220A1 Rate gyroscope and accelerometer multisensor, and method of fabricating same Public/Granted day:2005-10-27
Information query