发明授权
- 专利标题: Electroplating apparatus with segmented anode array
- 专利标题(中): 具有分段阳极阵列的电镀设备
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申请号: US10234638申请日: 2002-09-03
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公开(公告)号: US07357850B2公开(公告)日: 2008-04-15
- 发明人: Daniel J. Woodruff , Kyle M. Hanson
- 申请人: Daniel J. Woodruff , Kyle M. Hanson
- 申请人地址: US MT Kalispell
- 专利权人: Semitool, Inc.
- 当前专利权人: Semitool, Inc.
- 当前专利权人地址: US MT Kalispell
- 代理机构: Perkins Coie LLP
- 主分类号: C25D17/12
- IPC分类号: C25D17/12 ; C25D17/00 ; C25B9/00 ; C25D3/38
摘要:
An electroplating apparatus includes a reactor vessel having a segmented anode array positioned therein for effecting electroplating of an associated workpiece such as a semiconductor wafer. The anode array includes a plurality of ring-like anode segments which are preferably positioned in concentric, coplanar relationship with each other. The anode segments can be independently operated to create varying electrical potentials with the associated workpiece to promote uniform deposition of electroplated metal on the surface of the workpiece.
公开/授权文献
- US20030062258A1 Electroplating apparatus with segmented anode array 公开/授权日:2003-04-03
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