发明授权
US07358159B2 Method for manufacturing ZnTe compound semiconductor single crystal ZnTe compound semiconductor single crystal, and semiconductor device
失效
制造ZnTe化合物半导体单晶ZnTe化合物半导体单晶的方法及半导体器件
- 专利标题: Method for manufacturing ZnTe compound semiconductor single crystal ZnTe compound semiconductor single crystal, and semiconductor device
- 专利标题(中): 制造ZnTe化合物半导体单晶ZnTe化合物半导体单晶的方法及半导体器件
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申请号: US10472446申请日: 2002-03-20
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公开(公告)号: US07358159B2公开(公告)日: 2008-04-15
- 发明人: Tetsuya Yamamoto , Atsutoshi Arakawa , Kenji Sato , Toshiaki Asahi
- 申请人: Tetsuya Yamamoto , Atsutoshi Arakawa , Kenji Sato , Toshiaki Asahi
- 申请人地址: JP Tokyo
- 专利权人: Nippon Mining & Metals Co., Ltd.
- 当前专利权人: Nippon Mining & Metals Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 优先权: JP2001-106295 20010404; JP2001-204419 20010705; JP2001-330193 20011029; JP2001-330194 20011029
- 国际申请: PCT/JP02/02642 WO 20020320
- 国际公布: WO02/081789 WO 20021017
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
The present invention relates to a method for producing an n-type ZnTe system compound semiconductor single crystal having high carrier concentration and low resistivity, the ZnTe system compound semiconductor single crystal, and a semiconductor device produced by using the ZnTe system compound semiconductor as a base member. Concretely, a first dopant and a second dopant are co-doped into the ZnTe system compound semiconductor single crystal so that the number of atoms of the second dopant becomes smaller than the number of atoms of the first dopant, the first dopant being for controlling a conductivity type of the ZnTe system compound semiconductor to a first conductivity type, and the second dopant being for controlling the conductivity type to a second conductivity type different from the first conductivity type. By the present invention, a desired carrier concentration can be achieved with a doping amount smaller than in earlier technology, and crystallinity of the obtained crystal can be improved.
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