发明授权
- 专利标题： Method of manufacturing master disk, apparatus of manufacturing master disk, method of detecting moving distance difference of master disk, and apparatus of detecting moving distance difference of master disk
- 专利标题（中）： 制造母盘的方法，制造主盘的装置，检测主盘的移动距离差的方法以及检测主盘移动距离差的装置
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申请号： US10570962申请日： 2004-09-03
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公开(公告)号： US07361456B2公开(公告)日： 2008-04-22
- 发明人: Masahiko Tsukuda , Shinya Abe
- 申请人： Masahiko Tsukuda , Shinya Abe
- 申请人地址： JP Osaka
- 专利权人： Matsushita Electric Industrial Co., Ltd.
- 当前专利权人： Matsushita Electric Industrial Co., Ltd.
- 当前专利权人地址： JP Osaka
- 代理机构： Ratner Prestia
- 优先权： JP2003-315998 20030908
- 国际申请： PCT/JP2004/013180 WO 20040903
- 国际公布： WO2005/024807 WO 20050317
- 主分类号： G11B7/26
- IPC分类号： G11B7/26 ; G03C5/00
摘要：
A method is provided for manufacturing a master disk in which there is precise feeding accuracy of the master disk by using a horizontally moving device which moves with curvature. The method of manufacturing a master disk includes the steps of rotating a resist master disk; moving the resist master disk; reading a moving distance on a path of the center point of the resist master disk associated with the movement; detecting a difference between the moving distance on the path of the center point and a moving distance on a straight line of the center point of the resist master disk associated with the movement; and controlling a predetermined manufacturing parameter on the basis of the detection result.
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