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1.发明授权公开(公告)号：US07361456B2
公开(公告)日：2008-04-22
申请号：US10570962
申请日：2004-09-03
申请人： Masahiko Tsukuda , Shinya Abe
发明人： Masahiko Tsukuda , Shinya Abe
CPC分类号： G11B7/261 , Y10S430/146 , Y10T29/49769 , Y10T29/53061
摘要： A method is provided for manufacturing a master disk in which there is precise feeding accuracy of the master disk by using a horizontally moving device which moves with curvature. The method of manufacturing a master disk includes the steps of rotating a resist master disk; moving the resist master disk; reading a moving distance on a path of the center point of the resist master disk associated with the movement; detecting a difference between the moving distance on the path of the center point and a moving distance on a straight line of the center point of the resist master disk associated with the movement; and controlling a predetermined manufacturing parameter on the basis of the detection result.
摘要翻译： 提供一种用于制造母盘的方法，其中通过使用以曲率移动的水平移动装置，主盘具有精确的进给精度。 制造母盘的方法包括以下步骤：旋转抗蚀剂母盘; 移动抗蚀剂母盘; 在与所述运动相关联的所述抗蚀剂母盘的中心点的路径上读取移动距离; 检测中心点的路径上的移动距离与与移动相关联的抗蚀剂母盘的中心点的直线上的移动距离之间的差异; 以及基于检测结果来控制预定的制造参数。
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2.发明申请Exposure apparatus of an optical disk master, method of exposing an optical disk master and pinhole mechanism 失效光盘主机的曝光装置，曝光光盘主机和针孔机构的方法公开(公告)号：US20050088949A1
公开(公告)日：2005-04-28
申请号：US10975605
申请日：2004-10-28
申请人： Masahiko Tsukuda , Shinya Abe , Morio Tomiyama , Shuji Sato , Eiichi Ito
发明人： Masahiko Tsukuda , Shinya Abe , Morio Tomiyama , Shuji Sato , Eiichi Ito
CPC分类号： G11B7/261 , G11B7/128 , G11B7/1378
摘要： An exposure apparatus of an optical disk master having a laser source, a deflector for deflecting a recording laser beam obtained based on the laser beam of the laser source and an objective lens for focusing the recording laser beam on an optical disk master, has a lens system provided between the laser source and the deflector, which has a first lens for focusing the laser beam and a second lens for adjusting the focused laser beam to a desired beam diameter; and a pinhole placed at a practical focal position of the lens system.
摘要翻译： 具有激光源的光盘主机的曝光装置，用于偏转基于激光源的激光束获得的记录激光束的偏转器和用于将记录激光束聚焦在光盘主机上的物镜具有透镜 设置在激光源和偏转器之间的系统，该偏转器具有用于聚焦激光束的第一透镜和用于将聚焦的激光束调整到所需光束直径的第二透镜; 以及放置在透镜系统的实际焦点位置处的针孔。
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3.发明授权Electron beam recorder, electron beam irradiation position detecting method and electron beam irradiation position controlling method 失效电子束记录仪，电子束照射位置检测方法和电子束照射位置控制方法公开(公告)号：US07474604B2
公开(公告)日：2009-01-06
申请号：US11076787
申请日：2005-03-10
申请人： Masahiko Tsukuda , Shinya Abe
发明人： Masahiko Tsukuda , Shinya Abe
IPC分类号： G11B7/00
CPC分类号： H01J37/3045 , G11B7/261 , G11B9/10 , G11B11/03 , H01J2237/3045
摘要： An electron beam recorder includes an electron optical system for irradiating the electron beam on a master of an information recording medium and a shielding plate for shielding the electron beam. An electron beam irradiation quantity detector is provided on the shielding plate and is divided into first and second electron beam detecting portions along an information recording direction on the master. A difference detector calculates a difference between a first quantity of the electron beam irradiated on the first electron beam detecting portion and a second quantity of the electron beam irradiated on the second electron beam detecting portion such that a position of the electron beam in a direction substantially perpendicular to the information recording direction is detected from the difference.
摘要翻译： 电子束记录器包括用于在信息记录介质的母版上照射电子束的电子光学系统和用于屏蔽电子束的屏蔽板。 电子束照射量检测器设置在屏蔽板上，沿主机的信息记录方向被分成第一和第二电子束检测部分。 差分检测器计算照射在第一电子束检测部分的电子束的第一数量和照射在第二电子束检测部分上的第二电子束数量之间的差，使得电子束在基本上 从该差异检测垂直于信息记录方向的信息。
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4.发明申请ELECTRON BEAM RECORDER AND ELECTRON BEAM IRRADIATION POSITION DETECTING METHOD 失效电子束记录仪和电子束辐照位置检测方法公开(公告)号：US20080144472A1
公开(公告)日：2008-06-19
申请号：US12031416
申请日：2008-02-14
申请人： Masahiko Tsukuda , Shinya Abe
发明人： Masahiko Tsukuda , Shinya Abe
IPC分类号： G11B7/00
CPC分类号： B82Y10/00 , B82Y40/00 , G11B7/261 , G11B9/10 , H01J37/3045 , H01J37/3174
摘要： An electron beam recorder includes an electron optical system for irradiating an electron beam on a master of an information recording medium and an electron beam irradiation position detecting unit for detecting an irradiation position of the electron beam in the electron optical system while the electron beam is being irradiated on the master by the electron optical system.
摘要翻译： 电子束记录器包括用于在信息记录介质的母版上照射电子束的电子光学系统和用于在电子束处于电子束的状态下检测电子束系统中的电子束的照射位置的电子束照射位置检测单元 通过电子光学系统照射在主机上。
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5.发明申请Disk master producing method, disk master producing device, method for detecting difference in disk master travel distance, and device for detecting difference in disk master travel distance 失效磁盘制作方法，磁盘制作装置，检测磁盘主移动距离的差异的方法以及用于检测磁盘主移动距离的差异的装置公开(公告)号：US20060248967A1
公开(公告)日：2006-11-09
申请号：US10570962
申请日：2004-09-03
申请人： Masahiko Tsukuda , Shinya Abe
发明人： Masahiko Tsukuda , Shinya Abe
CPC分类号： G11B7/261 , Y10S430/146 , Y10T29/49769 , Y10T29/53061
摘要： A method is provided for manufacturing a master disk in which there is precise feeding accuracy of the master disk by using a horizontally moving device which moves with curvature. The method of manufacturing a master disk includes the steps of rotating a resist master disk; moving the resist master disk; reading a moving distance on a path of the center point of the resist master disk associated with the movement; detecting a difference between the moving distance on the path of the center point and a moving distance on a straight line of the center point of the resist master disk associated with the movement; and controlling a predetermined manufacturing parameter on the basis of the detection result.
摘要翻译： 提供一种用于制造母盘的方法，其中通过使用以曲率移动的水平移动装置，主盘具有精确的进给精度。 制造母盘的方法包括以下步骤：旋转抗蚀剂母盘; 移动抗蚀剂母盘; 在与所述运动相关联的所述抗蚀剂母盘的中心点的路径上读取移动距离; 检测中心点的路径上的移动距离与与移动相关联的抗蚀剂母盘的中心点的直线上的移动距离之间的差异; 以及基于检测结果来控制预定的制造参数。
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6.发明授权公开(公告)号：US07236434B2
公开(公告)日：2007-06-26
申请号：US10975605
申请日：2004-10-28
申请人： Masahiko Tsukuda , Shinya Abe , Morio Tomiyama , Shuji Sato , Eiichi Ito
发明人： Masahiko Tsukuda , Shinya Abe , Morio Tomiyama , Shuji Sato , Eiichi Ito
CPC分类号： G11B7/261 , G11B7/128 , G11B7/1378
摘要： Apparatus and method for exposing an optical disk master having a laser source, a deflector for deflecting a recording laser beam based on the laser beam of the laser source and an objective lens for focusing the recording laser beam on an optical disk master, including a liquid crystal plate provided between the laser source and the deflector, a parallel flat plate provided between the deflector and the objective lens, a photodetector that detects reflected light from the parallel flat plate, and an adjusting device for adjusting a voltage applied to the liquid crystal plate based on information on wavefront fluctuation of the recording laser beam detected by the photodetector.
摘要翻译： 用于曝光具有激光源的光盘主机的装置和方法，用于基于激光源的激光束偏转记录激光束的偏转器和用于将记录激光束聚焦在包括液体的光盘主机的物镜 设置在激光源和偏转器之间的晶体板，设置在偏转器和物镜之间的平行平板，检测来自平行平板的反射光的光电检测器，以及用于调节施加到液晶板的电压的调节装置 基于由光电检测器检测的记录激光束的波前波动的信息。
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公开(公告)号：US06894959B2
公开(公告)日：2005-05-17
申请号：US10227625
申请日：2002-08-22
申请人： Shuji Sato , Shinya Abe , Morio Tomiyama , Masahiko Tsukuda , Eiichi Ito
发明人： Shuji Sato , Shinya Abe , Morio Tomiyama , Masahiko Tsukuda , Eiichi Ito
CPC分类号： G11B7/261 , G11B7/08547 , G11B7/0901 , G11B7/128 , G11B7/24079
摘要： A method for exposing an optical disk master includes rotating a substrate disk coated with a photoresist, focusing a beam on the photoresist for exposure through an objective lens, and exposing the photoresist so as to form tracks on the substrate disk in its circumferential direction. At this time, the beam is deflected at least temporarily by passing through a deflector. The beam is divided into a first beam and a second beam after passing through the deflector, and the first beam is focused on the photoresist. A difference between the current position and the target position of an optical path of the second beam is detected, and the deflection operation of the deflector is corrected based on the difference so that the optical path of the second beam is located at the target position. This method can improve the track pitch accuracy of an optical disk having a narrow track pitch.
摘要翻译： 用于曝光光盘主机的方法包括旋转涂覆有光致抗蚀剂的基片，将光束聚焦在光致抗蚀剂上以通过物镜进行曝光，并使光致抗蚀剂曝光，以便在基片圆盘的圆周方向上形成轨迹。 此时，梁通过偏转器至少临时偏转。 光束在穿过偏转器之后被分成第一光束和第二光束，第一光束被聚焦在光致抗蚀剂上。 检测第二光束的光路的当前位置和目标位置之间的差异，并且基于差异校正偏转器的偏转操作，使得第二光束的光路位于目标位置。 该方法可以提高具有窄轨道间距的光盘的轨道间距精度。
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公开(公告)号：US20050058054A1
公开(公告)日：2005-03-17
申请号：US10975580
申请日：2004-10-28
申请人： Masahiko Tsukuda , Shinya Abe , Morio Tomiyama , Shuji Sato , Eiichi Ito
发明人： Masahiko Tsukuda , Shinya Abe , Morio Tomiyama , Shuji Sato , Eiichi Ito
CPC分类号： G11B7/261 , G11B7/128 , G11B7/1378
摘要： An exposure apparatus of an optical disk master having a laser source, a deflector for deflecting a recording laser beam obtained based on the laser beam of the laser source and an objective lens for focusing the recording laser beam on an optical disk master, has a lens system provided between the laser source and the deflector, which has a first lens for focusing the laser beam and a second lens for adjusting the focused laser beam to a desired beam diameter; and a pinhole placed at a practical focal position of the lens system.
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9.发明授权Exposure apparatus of an optical disk master, method of exposing an optical disk master and pinhole mechanism 失效光盘主机的曝光装置，曝光光盘主机和针孔机构的方法公开(公告)号：US07272099B2
公开(公告)日：2007-09-18
申请号：US10187491
申请日：2002-07-01
申请人： Masahiko Tsukuda , Shinya Abe , Morio Tomiyama , Shuji Sato , Eiichi Ito
发明人： Masahiko Tsukuda , Shinya Abe , Morio Tomiyama , Shuji Sato , Eiichi Ito
IPC分类号： G11B7/00
CPC分类号： G11B7/261 , G11B7/128 , G11B7/1378
摘要： An exposure apparatus of an optical disk master having a laser source, a deflector for deflecting a recording laser beam obtained based on the laser beam of the laser source and an objective lens for focusing the recording laser beam on an optical disk master, has a lens system provided between the laser source and the deflector, which has a first lens for focusing the laser beam and a second lens for adjusting the focused laser beam to a desired beam diameter; and a pinhole placed at a practical focal position of the lens system.
摘要翻译： 具有激光源的光盘主机的曝光装置，用于偏转基于激光源的激光束获得的记录激光束的偏转器和用于将记录激光束聚焦在光盘主机上的物镜具有透镜 设置在激光源和偏转器之间的系统，该偏转器具有用于聚焦激光束的第一透镜和用于将聚焦的激光束调整到所需光束直径的第二透镜; 以及放置在透镜系统的实际焦点位置处的针孔。
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公开(公告)号：US07068590B2
公开(公告)日：2006-06-27
申请号：US11000418
申请日：2004-12-01
申请人： Masahiko Tsukuda , Shinya Abe , Shuji Sato
发明人： Masahiko Tsukuda , Shinya Abe , Shuji Sato
IPC分类号： G11B7/24
CPC分类号： G11B7/24038 , G11B7/007 , G11B7/24076 , G11B7/24079 , G11B7/263
摘要： The width and/or depth of guide grooves on the disc substrate surface are changed in each data recording layer and the guide groove depth of the recording film layer is appropriately shaped in each data recording layer to provide a high density, high recording capacity optical disc. The optical disc has plural substrate layers each having plural guide grooves; plural data recording layers laminated on the substrate layers, each of the plural data recording layers having a recording film for recording data over the guide grooves; and an intermediate layer between the plural data recording layers. The guide groove width is different on each substrate layer. The guide grooves of the data recording layers formed according to the guide grooves of the substrate layer have the same pitch in each data recording layer.
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