发明授权
US07365382B2 Semiconductor memory having charge trapping memory cells and fabrication method thereof
有权
具有电荷捕获存储单元的半导体存储器及其制造方法
- 专利标题: Semiconductor memory having charge trapping memory cells and fabrication method thereof
- 专利标题(中): 具有电荷捕获存储单元的半导体存储器及其制造方法
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申请号: US11067983申请日: 2005-02-28
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公开(公告)号: US07365382B2公开(公告)日: 2008-04-29
- 发明人: Josef Willer , Thomas Mikolajick , Christoph Ludwig , Norbert Schulze , Karl-Heinz Kuesters
- 申请人: Josef Willer , Thomas Mikolajick , Christoph Ludwig , Norbert Schulze , Karl-Heinz Kuesters
- 申请人地址: DE Munich
- 专利权人: Infineon Technologies AG
- 当前专利权人: Infineon Technologies AG
- 当前专利权人地址: DE Munich
- 代理机构: Dicke, Billig & Czaja PLLC
- 主分类号: H01L29/76
- IPC分类号: H01L29/76
摘要:
A semiconductor memory having charge trapping memory cells, where the direction of current flow of each channel region of the memory transistors runs transversely with respect to the relevant word line, the bit lines are arranged on the top side of the word lines and in a manner electrically insulated from the latter, and electrically conductive local interconnects of source-drain regions are present, which are arranged in sections in interspaces between the word lines and in a manner electrically insulated from the latter and connected to the bit lines, wherein gate electrodes are arranged in trenches at least partly formed in the memory substrate.
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