发明授权
- 专利标题: MEMS vascular sensor
- 专利标题(中): MEMS血管传感器
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申请号: US11196849申请日: 2005-08-04
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公开(公告)号: US07367237B2公开(公告)日: 2008-05-06
- 发明人: Tzung K. Hsiai , Gopkrishnani Soundararajan , E. S. Kim , Hongyu Yu , Mahsa Rouhanizadeh , Tiantian Lin
- 申请人: Tzung K. Hsiai , Gopkrishnani Soundararajan , E. S. Kim , Hongyu Yu , Mahsa Rouhanizadeh , Tiantian Lin
- 申请人地址: US CA Los Angeles
- 专利权人: University of Southern California
- 当前专利权人: University of Southern California
- 当前专利权人地址: US CA Los Angeles
- 代理机构: McDermott Will & Emery LLP
- 主分类号: G01N3/24
- IPC分类号: G01N3/24 ; G01F1/68
摘要:
A micromachined sensor for measuring vascular parameters, such as fluid shear stress, includes a substrate having a front-side surface, and a backside surface opposite the front-side surface. The sensor includes a diaphragm overlying a cavity etched within the substrate, and a heat sensing element disposed on the front-side surface of the substrate and on top of the cavity and the diaphragm. The heat sensing element is electrically couplable to electrode leads formed on the backside surface of the substrate. The sensor includes an electronic system connected to the backside surface and configured to measure a change in heat convection from the sensing element to surrounding fluid when the sensing element is heated by applying an electric current thereto, and further configured to derive from the change in heat convection vascular parameters such as the shear stress of fluid flowing past the sensing element.
公开/授权文献
- US20060081064A1 MEMS vascular sensor 公开/授权日:2006-04-20
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