公开(公告)号：US07367237B2

公开(公告)日：2008-05-06

申请号：US11196849

申请日：2005-08-04

申请人： Tzung K. Hsiai ,  Gopkrishnani Soundararajan ,  E. S. Kim ,  Hongyu Yu ,  Mahsa Rouhanizadeh ,  Tiantian Lin

发明人： Tzung K. Hsiai ,  Gopkrishnani Soundararajan ,  E. S. Kim ,  Hongyu Yu ,  Mahsa Rouhanizadeh ,  Tiantian Lin

IPC分类号： G01N3/24 ,  G01F1/68

CPC分类号： B81C1/00246 ,  G01N3/24

摘要： A micromachined sensor for measuring vascular parameters, such as fluid shear stress, includes a substrate having a front-side surface, and a backside surface opposite the front-side surface. The sensor includes a diaphragm overlying a cavity etched within the substrate, and a heat sensing element disposed on the front-side surface of the substrate and on top of the cavity and the diaphragm. The heat sensing element is electrically couplable to electrode leads formed on the backside surface of the substrate. The sensor includes an electronic system connected to the backside surface and configured to measure a change in heat convection from the sensing element to surrounding fluid when the sensing element is heated by applying an electric current thereto, and further configured to derive from the change in heat convection vascular parameters such as the shear stress of fluid flowing past the sensing element.

摘要翻译： 用于测量诸如流体剪切应力的血管参数的微加工传感器包括具有前侧表面的基底和与前侧表面相对的背侧表面。 传感器包括覆盖在衬底内蚀刻的空腔的膜片，以及设置在衬底的前侧表面上并且在空腔和隔膜顶部上的感热元件。 热敏元件可电连接到形成在基板的背面上的电极引线。 所述传感器包括连接到所述背面的电子系统，并且被配置为当通过向其施加电流来加热所述感测元件时，测量从所述感测元件到周围流体的热对流变化，并进一步被配置为从热变化 对流血管参数，例如流过感测元件的流体的剪切应力。

公开(公告)号：US20080210543A1

公开(公告)日：2008-09-04

申请号：US12041577

申请日：2008-03-03

申请人： Tzung K. Hsiai ,  Gopkrishnani Soundararajan ,  E.S. Kim ,  Hongyu Yu ,  Mahsa Rouhanizadeh ,  Tiantian Lin

发明人： Tzung K. Hsiai ,  Gopkrishnani Soundararajan ,  E.S. Kim ,  Hongyu Yu ,  Mahsa Rouhanizadeh ,  Tiantian Lin

IPC分类号： C23C14/34

CPC分类号： B81C1/00246 ,  G01N3/24

摘要： A micromachined sensor for measuring vascular parameters, such as fluid shear stress, includes a substrate having a front-side surface, and a backside surface opposite the front-side surface. The sensor includes a diaphragm overlying a cavity etched within the substrate, and a heat sensing element disposed on the front-side surface of the substrate and on top of the cavity and the diaphragm. The heat sensing element is electrically couplable to electrode leads formed on the backside surface of the substrate. The sensor includes an electronic system connected to the backside surface and configured to measure a change in heat convection from the sensing element to surrounding fluid when the sensing element is heated by applying an electric current thereto, and further configured to derive from the change in heat convection vascular parameters such as the shear stress of fluid flowing past the sensing element.

摘要翻译： 用于测量诸如流体剪切应力的血管参数的微加工传感器包括具有前侧表面的基底和与前侧表面相对的背侧表面。 传感器包括覆盖在衬底内蚀刻的空腔的膜片，以及设置在衬底的前侧表面上并且在空腔和隔膜顶部上的感热元件。 热敏元件可电连接到形成在基板的背面上的电极引线。 所述传感器包括连接到所述背面的电子系统，并且被配置为当通过向其施加电流来加热所述感测元件时，测量从所述感测元件到周围流体的热对流变化，并进一步被配置为从热变化 对流血管参数，例如流过感测元件的流体的剪切应力。

公开(公告)号：US08216434B2

公开(公告)日：2012-07-10

申请号：US12041577

申请日：2008-03-03

申请人： Tzung K. Hsiai ,  Gopikrishnan Soundararajan ,  Eun Sok Kim ,  Hongyu Yu ,  Mahsa Rouhanizadeh ,  Christina Tiantian Lin

发明人： Tzung K. Hsiai ,  Gopikrishnan Soundararajan ,  Eun Sok Kim ,  Hongyu Yu ,  Mahsa Rouhanizadeh ,  Christina Tiantian Lin

IPC分类号： C23C14/34

CPC分类号： B81C1/00246 ,  G01N3/24

摘要： A micromachined sensor for measuring vascular parameters, such as fluid shear stress, includes a substrate having a front-side surface, and a backside surface opposite the front-side surface. The sensor includes a diaphragm overlying a cavity etched within the substrate, and a heat sensing element disposed on the front-side surface of the substrate and on top of the cavity and the diaphragm. The heat sensing element is electrically couplable to electrode leads formed on the backside surface of the substrate. The sensor includes an electronic system connected to the backside surface and configured to measure a change in heat convection from the sensing element to surrounding fluid when the sensing element is heated by applying an electric current thereto, and further configured to derive from the change in heat convection vascular parameters such as the shear stress of fluid flowing past the sensing element.

摘要翻译： 用于测量诸如流体剪切应力的血管参数的微加工传感器包括具有前侧表面的基底和与前侧表面相对的背侧表面。 传感器包括覆盖在衬底内蚀刻的空腔的膜片，以及设置在衬底的前侧表面上并且在空腔和隔膜顶部上的感热元件。 热敏元件可电连接到形成在基板的背面上的电极引线。 所述传感器包括连接到所述背面的电子系统，并且被配置为当通过向其施加电流来加热所述感测元件时，测量从所述感测元件到周围流体的热对流变化，并进一步被配置为从热变化 对流血管参数，例如流过感测元件的流体的剪切应力。

公开(公告)号：US20120215121A1

公开(公告)日：2012-08-23

申请号：US13461716

申请日：2012-05-01

申请人： Tzung K. Hsiai ,  Gopikrishnan Soundararajan ,  Eun Sok Kim ,  Hongyu Yu ,  Mahsa Rouhanizadeh ,  Christina Tiantian Lin

发明人： Tzung K. Hsiai ,  Gopikrishnan Soundararajan ,  Eun Sok Kim ,  Hongyu Yu ,  Mahsa Rouhanizadeh ,  Christina Tiantian Lin

IPC分类号： A61B5/027

CPC分类号： B81C1/00246 ,  G01N3/24

摘要： A micromachined sensor for measuring vascular parameters, such as fluid shear stress, includes a substrate having a front-side surface, and a backside surface opposite the front-side surface. The sensor includes a diaphragm overlying a cavity etched within the substrate, and a heat sensing element disposed on the front-side surface of the substrate and on top of the cavity and the diaphragm. The heat sensing element is electrically couplable to electrode leads formed on the backside surface of the substrate. The sensor includes an electronic system connected to the backside surface and configured to measure a change in heat convection from the sensing element to surrounding fluid when the sensing element is heated by applying an electric current thereto, and further configured to derive from the change in heat convection vascular parameters such as the shear stress of fluid flowing past the sensing element.

摘要翻译： 用于测量诸如流体剪切应力的血管参数的微加工传感器包括具有前侧表面的基底和与前侧表面相对的背侧表面。 传感器包括覆盖在衬底内蚀刻的空腔的膜片，以及设置在衬底的前侧表面上并且在空腔和隔膜顶部上的感热元件。 热敏元件可电连接到形成在基板的背面上的电极引线。 所述传感器包括连接到所述背面的电子系统，并且被配置为当通过向其施加电流来加热所述感测元件时，测量从所述感测元件到周围流体的热对流变化，并进一步被配置为从热变化 对流血管参数，例如流过感测元件的流体的剪切应力。

公开(公告)号：US20080302675A1

公开(公告)日：2008-12-11

申请号：US12134938

申请日：2008-06-06

申请人： Tzung K. Hsiai ,  Hongyu Yu ,  Eun Sok Kim ,  Lisong Ai

发明人： Tzung K. Hsiai ,  Hongyu Yu ,  Eun Sok Kim ,  Lisong Ai

IPC分类号： B44C1/22 ,  G01N27/26

CPC分类号： A61B5/6852 ,  A61B5/01 ,  A61B5/02007 ,  A61B5/02141 ,  A61B5/0215 ,  A61B5/02156 ,  A61B5/026 ,  A61B5/027 ,  A61B5/053 ,  A61B2562/0261 ,  A61B2562/0271 ,  A61B2562/12 ,  A61B2562/125 ,  A61B2562/222 ,  A61M2025/0002 ,  A61M2205/3368 ,  B05D7/50 ,  G01K13/002

摘要： A flexible, polymer-based biosensor deployable into the arterial system which can assess shear stress in the arterial geometry in the presence of time-varying component of blood flow. Also, a method of fabricating a biosensor which may be used for in vivo procedures, involving the sequential depositing onto a substrate of a silicon dioxide layer, a metal heating element on the silicon dioxide layer, and a biocompatible polymer on the heating element, followed by etching the polymer layer to provide holes to allow for electrode contact with the heating element. A second metal layer is then deposited to form electrodes, followed by a second biocompatible polymer layer to form the device structure and removing the fabricated biosensor from the substrate by etching the substrate. In addition, a method of determining intravascular shear stress by measuring the temperature, flow rate and pressure of a bodily fluid with a biocompatible biosensor is disclosed.

摘要翻译： 柔性的基于聚合物的生物传感器可部署到动脉系统中，其可以在存在血流时变分量的情况下评估动脉几何形状中的剪切应力。 此外，制造可用于体内程序的生物传感器的方法，包括顺序沉积到二氧化硅层的基底上，二氧化硅层上的金属加热元件和加热元件上的生物相容性聚合物，随后 通过蚀刻聚合物层以提供孔以允许电极与加热元件接触。 然后沉积第二金属层以形成电极，随后是第二生物相容性聚合物层以形成器件结构，并通过蚀刻衬底从衬底去除所制造的生物传感器。 另外，公开了通过用生物相容性生物传感器测量体液的温度，流速和压力来确定血管内剪切应力的方法。