发明授权
- 专利标题： Porous composition of matter, and method of making same
- 专利标题（中）： 物质的多孔组成及其制备方法
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申请号： US10827694申请日： 2004-04-19
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公开(公告)号： US07368483B2公开(公告)日： 2008-05-06
- 发明人: Eric Connor , James P. Godschalx , Craig J. Hawker , James L. Hedrick , Victor Yee-Way Lee , Teddie P. Magbitang , Robert D. Miller , Q. Jason Niu , Willi Volksen
- 申请人： Eric Connor , James P. Godschalx , Craig J. Hawker , James L. Hedrick , Victor Yee-Way Lee , Teddie P. Magbitang , Robert D. Miller , Q. Jason Niu , Willi Volksen
- 申请人地址： US NY Armonk US MI Midland
- 专利权人： International Business Machines Corporation,Dow Global Technologies, Inc.
- 当前专利权人： International Business Machines Corporation,Dow Global Technologies, Inc.
- 当前专利权人地址： US NY Armonk US MI Midland
- 代理机构： Scully, Scott, Murphy & Presser
- 主分类号： C08J9/02
- IPC分类号： C08J9/02 ; C08L83/02
摘要：
A low-k organic dielectric material having stable nano-sized porous is provided as well as a method of fabricating the same. The porous low-k organic dielectric material is made from a composition of matter having a vitrification temperature (Tv-comp) which includes a b-staged thermosetting resin having a vitrification temperate (Tv-resin), a pore generating material, and a reactive additive. The reactive additive lowers Tv-comp below Tv-resin.
公开/授权文献
- US20040198850A1 Porous composition of matter, and method of making same 公开/授权日：2004-10-07
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