Invention Grant
- Patent Title: Porous composition of matter, and method of making same
- Patent Title (中): 物质的多孔组成及其制备方法
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Application No.: US10827694Application Date: 2004-04-19
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Publication No.: US07368483B2Publication Date: 2008-05-06
- Inventor: Eric Connor , James P. Godschalx , Craig J. Hawker , James L. Hedrick , Victor Yee-Way Lee , Teddie P. Magbitang , Robert D. Miller , Q. Jason Niu , Willi Volksen
- Applicant: Eric Connor , James P. Godschalx , Craig J. Hawker , James L. Hedrick , Victor Yee-Way Lee , Teddie P. Magbitang , Robert D. Miller , Q. Jason Niu , Willi Volksen
- Applicant Address: US NY Armonk US MI Midland
- Assignee: International Business Machines Corporation,Dow Global Technologies, Inc.
- Current Assignee: International Business Machines Corporation,Dow Global Technologies, Inc.
- Current Assignee Address: US NY Armonk US MI Midland
- Agency: Scully, Scott, Murphy & Presser
- Main IPC: C08J9/02
- IPC: C08J9/02 ; C08L83/02
Abstract:
A low-k organic dielectric material having stable nano-sized porous is provided as well as a method of fabricating the same. The porous low-k organic dielectric material is made from a composition of matter having a vitrification temperature (Tv-comp) which includes a b-staged thermosetting resin having a vitrification temperate (Tv-resin), a pore generating material, and a reactive additive. The reactive additive lowers Tv-comp below Tv-resin.
Public/Granted literature
- US20040198850A1 Porous composition of matter, and method of making same Public/Granted day:2004-10-07
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