发明授权
- 专利标题： Methods and apparatus for determining a position of a substrate relative to a support stage
- 专利标题（中）： 用于确定衬底相对于支撑台的位置的方法和装置
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申请号： US10782503申请日： 2004-02-19
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公开(公告)号： US07372250B2公开(公告)日： 2008-05-13
- 发明人: Shinichi Kurita , Emanuel Beer , Edgar Kehrberg , Matthias Brunner
- 申请人： Shinichi Kurita , Emanuel Beer , Edgar Kehrberg , Matthias Brunner
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Dugan & Dugan, P.C.
- 主分类号： G01R31/02
- IPC分类号： G01R31/02 ; G01R31/28
摘要：
A sensing system includes a plurality of probes arranged in a spaced relation around a stage that is adapted to support a substrate. Each probe includes a detection portion adapted to move from a known starting position toward an edge of the substrate that is supported by the stage; detect the edge of the substrate while the substrate is supported by the stage; generate a detection signal following said detection; and stop moving toward the edge of the substrate following said detection. A controller may determine an edge position of the substrate relative to the stage based on the known starting position of each detection portion and based on the detection signal generated by each detection portion. Numerous other aspects are provided.
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