-
1.发明授权Methods and apparatus for determining a position of a substrate relative to a support stage 失效用于确定衬底相对于支撑台的位置的方法和装置公开(公告)号：US07372250B2
公开(公告)日：2008-05-13
申请号：US10782503
申请日：2004-02-19
CPC分类号： H01L21/67265 , G03F7/707 , G03F7/70716 , G03F7/70775 , G03F7/70791 , G03F9/7011
摘要： A sensing system includes a plurality of probes arranged in a spaced relation around a stage that is adapted to support a substrate. Each probe includes a detection portion adapted to move from a known starting position toward an edge of the substrate that is supported by the stage; detect the edge of the substrate while the substrate is supported by the stage; generate a detection signal following said detection; and stop moving toward the edge of the substrate following said detection. A controller may determine an edge position of the substrate relative to the stage based on the known starting position of each detection portion and based on the detection signal generated by each detection portion. Numerous other aspects are provided.
摘要翻译： 感测系统包括围绕适于支撑衬底的平台间隔设置的多个探针。 每个探针包括适于从已知起始位置移动到由所述载物台支撑的所述基底的边缘的检测部分; 在衬底由载物台支撑的同时检测衬底的边缘; 在所述检测之后产生检测信号; 并且在所述检测之后停止移动到基板的边缘。 控制器可以基于每个检测部分的已知开始位置并且基于由每个检测部分生成的检测信号来确定基板相对于载物台的边缘位置。 提供了许多其他方面。
-
公开(公告)号：US20060022694A1
公开(公告)日：2006-02-02
申请号：US10901936
申请日：2004-07-29
IPC分类号： G01R31/26
CPC分类号： H01J37/185 , G01R31/2886 , H01J2237/204
摘要： A method and system for testing one or more large substrates are provided. In one or more embodiments, the system includes a testing chamber having a substrate table disposed therein. The substrate table is adapted to move a substrate within the testing chamber in various directions. More particularly, the substrate table includes a first stage movable in a first direction, and a second stage movable in a second direction, wherein each of the stages moves in an X-direction, Y-direction or both X and Y directions. The system further includes a load lock chamber at least partially disposed below the testing chamber, and a transfer chamber coupled to the load lock chamber and the testing chamber. In one or more embodiments, the transfer chamber includes a robot disposed therein which is adapted to transfer substrates between the load lock chamber and the testing chamber.
摘要翻译： 提供了用于测试一个或多个大基板的方法和系统。 在一个或多个实施例中，系统包括具有设置在其中的衬底台的测试室。 衬底台适于在各个方向上移动测试室内的衬底。 更具体地，衬底台包括可在第一方向上移动的第一阶段和沿第二方向移动的第二阶段，其中每个阶段沿X方向，Y方向或X方向和Y方向两者移动。 该系统还包括至少部分地设置在测试室下方的负载锁定室和耦合到负载锁定室和测试室的传送室。 在一个或多个实施例中，传送室包括设置在其中的机器人，其适于在载荷锁定室和测试室之间传送基板。
-
公开(公告)号：US07075323B2
公开(公告)日：2006-07-11
申请号：US10901936
申请日：2004-07-29
IPC分类号： G01R31/26
CPC分类号： H01J37/185 , G01R31/2886 , H01J2237/204
摘要： A method and system for testing one or more large substrates are provided. In one or more embodiments, the system includes a testing chamber having a substrate table disposed therein. The substrate table is adapted to move a substrate within the testing chamber in various directions. More particularly, the substrate table includes a first stage movable in a first direction, and a second stage movable in a second direction, wherein each of the stages moves in an X-direction, Y-direction or both X and Y directions. The system further includes a load lock chamber at least partially disposed below the testing chamber, and a transfer chamber coupled to the load lock chamber and the testing chamber. In one or more embodiments, the transfer chamber includes a robot disposed therein which is adapted to transfer substrates between the load lock chamber and the testing chamber.
-
公开(公告)号：US07129694B2
公开(公告)日：2006-10-31
申请号：US10155796
申请日：2002-05-23
IPC分类号： G01R31/28
CPC分类号： H01L21/67748 , G01R31/01 , H01L21/67288 , H01L21/682
摘要： A system and method for testing substrates is generally provided. In one embodiment, a test system for testing a substrate includes a load lock chamber, a transfer chamber and a test station. The load lock chamber and the test station are disposed on top of one another and coupled to the transfer chamber. The transfer chamber includes a robot adapted to transfer a substrate between the load lock chamber, which is at a first elevation, and the test station, which is at a second elevation. In another embodiment, a test station is provided having a turntable adapted to rotate the substrate. The turntable enables the range of motion required to test the substrate to be substantially reduced while facilitating full test and/or inspection of the substrate.
-
-
-
搜索结果
4 条记录 (耗时 0.016 秒)