发明授权
US07372544B2 Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus 失效
曝光装置,光学投影装置和调整光学投影装置的方法

Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus
摘要:
An exposure apparatus includes a plurality of projection optical systems, each of which has optical elements arranged in an optical path between a first surface and a second surface and forms a radiation pattern from the first surface onto an exposure field on the second surface via the optical elements. The apparatus also includes a movable portion disposed in the side of the second surface with respect to the plurality of projection optical systems, which holds an object to be moved relative to the exposure field in a first direction during a scanning exposure of the object with the radiation patterns. Each of the plurality of projection optical systems is telecentric on the side of the second surface, and the exposure fields are arranged at different positions in a second direction crossing the first direction.
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