Invention Grant
- Patent Title: Silicon wafer and method for producing silicon single crystal
- Patent Title (中): 硅晶片和硅单晶的制造方法
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Application No.: US11178096Application Date: 2005-07-07
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Publication No.: US07378071B2Publication Date: 2008-05-27
- Inventor: Hyon-Jong Cho , Cheol-Woo Lee , Hong-Woo Lee , Cheong Jin Soo , Kim Sunmi
- Applicant: Hyon-Jong Cho , Cheol-Woo Lee , Hong-Woo Lee , Cheong Jin Soo , Kim Sunmi
- Applicant Address: KR Kumi
- Assignee: Siltron Inc.
- Current Assignee: Siltron Inc.
- Current Assignee Address: KR Kumi
- Agency: Christie, Parker & Hale, LLP
- Priority: KR10-2002-0082733 20021223; KR10-2003-0080998 20031117
- Main IPC: C01B33/26
- IPC: C01B33/26 ; C30B15/20

Abstract:
A method for growing a silicon single crystal ingot by a Czochralski method, which is capable of providing silicon wafers having very uniform in-plane quality and which results in improvement of semiconductor device yield. A method is provided for producing a silicon single crystal ingot by a Czochralski method, wherein when convection of a silicon melt is divided into a core cell and an outer cell, the silicon single crystal ingot is grown under the condition that the maximal horizontal direction width of the core cell is 30 to 60% of a surface radius of the silicon melt. In one embodiment the silicon single crystal ingot is grown under the condition that the maximal vertical direction depth of the core cell is equal to or more than 50% of the maximal depth of the silicon melt.
Public/Granted literature
- US20060016386A1 Silicon wafer and method for producing silicon single crystal Public/Granted day:2006-01-26
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