发明授权
- 专利标题: Infrared radiation element and gas sensor using it
- 专利标题(中): 红外辐射元件和气体传感器使用它
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申请号: US10576951申请日: 2004-10-27
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公开(公告)号: US07378656B2公开(公告)日: 2008-05-27
- 发明人: Tsutomu Ichihara , Chousei Hamada , Koshi Akedo , Hiroaki Kitamura , Hiroshi Fukshima , Takuya Komoda , Takashi Hatai
- 申请人: Tsutomu Ichihara , Chousei Hamada , Koshi Akedo , Hiroaki Kitamura , Hiroshi Fukshima , Takuya Komoda , Takashi Hatai
- 申请人地址: JP Osaka
- 专利权人: Matsushita Electric Works, Ltd.
- 当前专利权人: Matsushita Electric Works, Ltd.
- 当前专利权人地址: JP Osaka
- 代理机构: Greenblum & Bernstein, P.L.C.
- 优先权: JP2003-366366 20031027; JP2004-156835 20040526
- 国际申请: PCT/JP2004/015914 WO 20041027
- 国际公布: WO2005/041246 WO 20050605
- 主分类号: G01J5/02
- IPC分类号: G01J5/02
摘要:
An infrared radiation element A heat insulating layer having sufficiently smaller thermal conductivity than a semiconductor substrate, is formed on a surface in the thickness direction of the semiconductor substrate. A heating layer, which is in the form of a lamina (plane) and has larger thermal conductivity and larger electrical conductivity than the heat insulating layer, is formed on the heat insulating layer. A pair of pads 4 for energization are formed on the heating layer. The semiconductor substrate is made of a silicon substrate. The heat insulating layer and the heating layer are formed by porous silicon layers having different porosities from each other, and the heating layer has smaller porosity than the heat insulating layer. By using the infrared radiation element as an infrared radiation source of a gas sensor, it becomes possible to extend a life of the infrared radiation source.
公开/授权文献
- US20070090293A1 Infrared radiation element and gas sensor using it 公开/授权日:2007-04-26
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