发明授权
- 专利标题: Solid-state image pickup device and manufacturing method for the same
- 专利标题(中): 固态摄像装置及其制造方法
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申请号: US11324657申请日: 2006-01-03
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公开(公告)号: US07382007B2公开(公告)日: 2008-06-03
- 发明人: Yoshiaki Kitano , Nobuhiro Karasawa , Jun Kuroiwa , Hideshi Abe , Mitsuru Sato , Hiroaki Ohki
- 申请人: Yoshiaki Kitano , Nobuhiro Karasawa , Jun Kuroiwa , Hideshi Abe , Mitsuru Sato , Hiroaki Ohki
- 申请人地址: JP Tokyo
- 专利权人: Sony Corporation
- 当前专利权人: Sony Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Rockey, Depke & Lyons LLC.
- 代理商 Robert J. Depke
- 优先权: JP2003-098783 20030402; JP2003-390305 20031120
- 主分类号: H01L31/062
- IPC分类号: H01L31/062 ; H01L31/113 ; H01L31/06 ; H01L29/04 ; H01L29/15
摘要:
A solid-state image pickup device includes, in a substrate, a plurality of photoelectric conversion regions for subjecting incoming light to photoelectric conversion, a reading gate for reading a signal charge from the photoelectric conversion regions, and a transfer register (vertical register) for transferring the signal charge read by the reading gate. Therein, a groove is formed on the surface side of the substrate, and the transfer register and the reading gate are formed at the bottom part of the groove. With such a structure, in the solid-state image pickup device, reduction can be achieved for the smear characteristics, a reading voltage, noise, and others.