Invention Grant
- Patent Title: Method of fabricating nano-structured surface and configuration of surface enhanced light scattering probe
- Patent Title (中): 制造纳米结构表面的方法和表面增强光散射探针的配置
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Application No.: US10852787Application Date: 2004-05-24
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Publication No.: US07384792B1Publication Date: 2008-06-10
- Inventor: Hong Wang , Zhimin Liu
- Applicant: Hong Wang , Zhimin Liu
- Applicant Address: US CA Sunnyvale
- Assignee: Opto Trace Technologies, Inc.
- Current Assignee: Opto Trace Technologies, Inc.
- Current Assignee Address: US CA Sunnyvale
- Agent Xin Wen
- Main IPC: G01N21/03
- IPC: G01N21/03 ; G01N33/558 ; B32B3/02 ; B32B7/12 ; H01J9/04

Abstract:
A method to fabricate an optical scattering probe and the method includes the steps of a) depositing an conductive layer on a substrate followed by depositing a noble metal layer on top of the conductive layer and then an aluminum layer on top the noble metal layer; b) anodizing the aluminum layer to form a porous aluminum oxide layer having a plurality of pores; and c) etching the plurality of pores through the aluminum oxide layer and the noble metal layer for forming a nano-hole array. In a preferred embodiment, the step of etching the plurality of pores through the aluminum oxide layer and the noble metal layer further comprising a step of widening the pores followed by removing the aluminum oxide layer for forming a plurality of noble metal column on top of the conductive layer.
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