发明授权
- 专利标题： Probe manufacturing method, probe, and scanning probe microscope
- 专利标题（中）： 探针制造方法，探头和扫描探针显微镜
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申请号： US10570198申请日： 2004-09-03
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公开(公告)号： US07388199B2公开(公告)日： 2008-06-17
- 发明人: Takafumi Morimoto , Tooru Shinaki , Yoshiyuki Nag'No , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa , Ken Murayama , Mitsuo Hayashibara , Kishio Hidaka , Tadashi Fujieda
- 申请人： Takafumi Morimoto , Tooru Shinaki , Yoshiyuki Nag'No , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa , Ken Murayama , Mitsuo Hayashibara , Kishio Hidaka , Tadashi Fujieda
- 申请人地址： JP Tokyo
- 专利权人： Hitachi Kenki Fine Tech Co., Ltd.
- 当前专利权人： Hitachi Kenki Fine Tech Co., Ltd.
- 当前专利权人地址： JP Tokyo
- 代理机构： Mattingly, Stanger, Malur & Brundidge, PC
- 优先权： JP2003-311579 20030903
- 国际申请： PCT/JP2004/012821 WO 20040903
- 国际公布： WO2005/024390 WO 20050317
- 主分类号： G21K7/00
- IPC分类号： G21K7/00
摘要：
A probe is made by attaching a carbon nanotube 12 to a mounting base end 13, which eliminates the effects of a carbon contamination film, to increase the bonding strength, increase the conductivity of the probe, and strengthen the bonding performance thereof by coating the entire circumference of the nanotube and the base with a coating film, rather than coating just one side. The work of mounting the carbon nanotube and mounting base end are performed under observation by a microscope. Further, the carbon contamination film 14 formed by an electron microscope is stripped off at a stage before bonding by the coating film.
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