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    Scanning probe microscope and measurement method using the same
    5.
    发明授权
    Scanning probe microscope and measurement method using the same 失效
    扫描探针显微镜和测量方法使用相同

    公开(公告)号：US07333191B2

    公开(公告)日：2008-02-19

    申请号：US10893364

    申请日：2004-07-19

    申请人： Ken Murayama ,  Yukio Kenbou ,  Yuuichi Kunitomo ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa

    发明人： Ken Murayama ,  Yukio Kenbou ,  Yuuichi Kunitomo ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa

    IPC分类号： G01B1/00

    CPC分类号： G01Q20/02 ,  G01Q30/06 ,  G01Q70/04

    摘要： A scanning probe microscope has a cantilever with a probe facing a sample and a measurement section for measuring a physical quantity occurring between the probe and the sample when the probe scans a surface of the sample, holding the physical quantity constant to measure the surface of the sample. The above microscope further has a probe tilt mechanism, an optical microscope etc. for detecting a position of the probe when the probe is tilted, and a control section for setting the probe in a first tilt posture and second tilt posture, measuring a surface of the sample by the measurement section at each tilt posture, detecting the position of the probe at least at the second tilt posture by the optical microscope etc., and making a measurement location at the second tilt posture match with a measurement location at the first tilt posture for measurement.

    摘要翻译： 扫描探针显微镜具有悬臂，探针面向样品和测量部分，用于测量探头和样品之间发生的物理量，当探针扫描样品的表面时，保持物理量常数以测量样品的表面 样品。 上述显微镜还具有探针倾斜机构，光学显微镜等，用于在探头倾斜时检测探头的位置;以及控制部，用于将探针设置在第一倾斜姿势和第二倾斜姿势中， 通过测量部分在每个倾斜姿势下的样本，至少通过光学显微镜等检测第二倾斜姿势的探测器的位置，并且使第二倾斜姿势的测量位置与第一倾斜处的测量位置匹配 测量姿势。

    Method of Control of Probe Scan and Apparatus for Controlling Probe Scan of Scanning Probe Microscope
    7.
    发明申请
    Method of Control of Probe Scan and Apparatus for Controlling Probe Scan of Scanning Probe Microscope 审中-公开
    探针扫描控制方法及扫描探针显微镜探头扫描控制装置

    公开(公告)号：US20080236259A1

    公开(公告)日：2008-10-02

    申请号：US11660271

    申请日：2005-08-18

    申请人： Tooru Kurenuma ,  Yukio Kenbou ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Takafumi Morimoto

    发明人： Tooru Kurenuma ,  Yukio Kenbou ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Takafumi Morimoto

    IPC分类号： G01B5/28

    CPC分类号： G01Q10/065

    摘要： A scanning probe microscope provided with a cantilever 21 having a probe 20 facing a sample 12, a measurement unit 24 measuring a physical quantity occurring between the probe and sample, and movement mechanisms 11, 29 changing a positional relationship between the probe and sample to cause a scanning operation and making the probe scan the surface of the sample by the movement mechanism and measure the surface of the sample by the measurement unit. This method is provided with a step of feeding the probe in a direction along the surface of the sample at a position separate from the surface at certain distances, a step of making the probe approach the sample at each of a plurality of measurement points determined at certain distances and perform measurement to obtain measurement values, then retract, and a step setting a measurement point at a position between a certain measurement point and next measurement point for measurement when a difference between a measurement value at the certain measurement point and a measurement value at the next measurement point is larger than a reference value.

    摘要翻译： 具有悬臂21的扫描探针显微镜，其具有面向样品12的探针20，测量在探针和样品之间发生的物理量的测量单元24和改变探针与样品之间的位置关系的移动机构11,29， 扫描操作并使探针通过移动机构扫描样品的表面，并通过测量单元测量样品的表面。 该方法具有以下步骤：沿着与样品表面在一定距离处分开的位置沿着样品表面的方向进给探针，使得探针在多个测量点中的每一个测量点处接近样品的步骤 一定距离并进行测量以获得测量值，然后缩回，并且当在某个测量点处的测量值与测量值之间的差异时，将某个测量点和下一测量点之间的位置处的测量点设置为测量点 在下一个测量点大于参考值。

    SURFACE INSPECTION APPARATUS AND METHOD THEREOF
    9.
    发明申请
    SURFACE INSPECTION APPARATUS AND METHOD THEREOF 有权
    表面检查装置及其方法

    公开(公告)号：US20120069329A1

    公开(公告)日：2012-03-22

    申请号：US13114160

    申请日：2011-05-24

    申请人： Ichiro ISHIMARU ,  Minori Noguchi ,  Ichiro Moriyama ,  Yoshikazu Tanabe ,  Yasuo Yatsugake ,  Yukio Kenbou ,  Kenji Watanabe ,  Hirofumi Tsuchiyama

    发明人： Ichiro ISHIMARU ,  Minori Noguchi ,  Ichiro Moriyama ,  Yoshikazu Tanabe ,  Yasuo Yatsugake ,  Yukio Kenbou ,  Kenji Watanabe ,  Hirofumi Tsuchiyama

    IPC分类号： G01N21/88

    CPC分类号： G01N21/88 ,  G01N21/474 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/9503 ,  G01N2021/8825 ,  G01N2021/8854

    摘要： A defect inspection apparatus including: a first illumination optical system which is configured to illuminate the inspection area on a sample surface from a normal line direction or a direction near thereof with respect to said sample surface; a second illumination optical system which is configured to illuminate said inspection area from a slant direction with respect to said sample surface; a detection optical system having a plurality of first detectors which are located, in front of, on the sides of, and behind said inspection area, respectively, with respect to the illumination direction of said second illumination optical system, and where the regular reflected light component, from said sample surface, by illumination light of said second illumination optical system, is not converged; and a signal processing system which is configured to inspect a defect, upon basis of signals obtained from said plurality of first detectors.

    摘要翻译： 一种缺陷检查装置，包括：第一照明光学系统，被配置为从相对于所述样品表面的法线方向或近似的方向照射样品表面上的检查区域; 第二照明光学系统，被配置为相对于所述样品表面从倾斜方向照射所述检查区域; 检测光学系统，具有分别相对于所述第二照明光学系统的照明方向位于所述检查区域的所述检查区域的前方和后方的多个第一检测器，并且其中所述规则反射光 从所述样品表面通过所述第二照明光学系统的照明光分量不会收敛; 以及信号处理系统，其被配置为基于从所述多个第一检测器获得的信号来检查缺陷。